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半导体纳/米线激光器与机械柔性衬底上聚合物波导器件的集成。

Integration of Semiconductor Nanowire Lasers with Polymeric Waveguide Devices on a Mechanically Flexible Substrate.

机构信息

Institute of Photonics, SUPA Department of Physics, University of Strathclyde, Technology and Innovation Centre , 99 George Street, G1 1RD, Glasgow, United Kingdom.

Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University , Canberra, ACT2601, Australia.

出版信息

Nano Lett. 2017 Oct 11;17(10):5990-5994. doi: 10.1021/acs.nanolett.7b02178. Epub 2017 Sep 21.

DOI:10.1021/acs.nanolett.7b02178
PMID:28873314
Abstract

Nanowire lasers are integrated with planar waveguide devices using a high positional accuracy microtransfer printing technique. Direct nanowire to waveguide coupling is demonstrated, with coupling losses as low as -17 dB, dominated by mode mismatch between the structures. Coupling is achieved using both end-fire coupling into a waveguide facet, and from nanowire lasers printed directly onto the top surface of the waveguide. In-waveguide peak powers up to 11.8 μW are demonstrated. Basic photonic integrated circuit functions such as power splitting and wavelength multiplexing are presented. Finally, devices are fabricated on a mechanically flexible substrate to demonstrate robust coupling between the on-chip laser source and waveguides under significant deformation of the system.

摘要

纳米线激光器通过高精度微转移打印技术与平面波导器件集成。通过端射耦合到波导端面和直接将纳米线打印到波导顶表面,实现了直接的纳米线到波导的耦合,耦合损耗低至-17dB,主要由结构之间的模式失配引起。在波导中,实现了高达 11.8μW 的峰值功率。展示了功率分配和波长复用等基本的光子集成电路功能。最后,在机械柔性衬底上制造了器件,在系统发生显著变形的情况下,展示了芯片上激光源和波导之间的稳健耦合。

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