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通过射频磁控溅射在SrTiO₃(100)衬底上制备多铁性共掺杂BiFeO₃外延薄膜

Fabrication of Multiferroic Co-Substituted BiFeO₃ Epitaxial Films on SrTiO₃ (100) Substrates by Radio Frequency Magnetron Sputtering.

作者信息

Begum Husne Ara, Naganuma Hiroshi, Oogane Mikihiko, Ando Yasuo

机构信息

Department of Applied Physics, Graduate School of Engineering, Tohoku University, 6-6-05, Aza-aoba, Aoba-ku, Sendai 980-8579, Japan.

出版信息

Materials (Basel). 2011 Jun 9;4(6):1087-1095. doi: 10.3390/ma4061087.

DOI:10.3390/ma4061087
PMID:28879967
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5448640/
Abstract

The 10 at.% Co-substituted BiFeO₃ films (of thickness 50 nm) were successfully prepared by radio frequency (r.f.) magnetron sputtering on SrTiO₃ (100) substrates with epitaxial relationships of 001Co-BiFeO₃//001SrTiO₃. In this study, a single phase Co-substituted BiFeO₃ epitaxial film was fabricated by r.f. magnetron sputtering. Sputtering conditions such as Ar, O₂ gas pressure, annealing temperature, annealing atmosphere, and sputtering power were systematically changed. It was observed that a low Ar gas pressure and low sputtering power is necessary to suppress the formation of the secondary phases of BiO. The Co-substituted BiFeO₃ films were crystalized with post-annealing at 600 °C in air. The process window for single phase films is narrower than that for pure BiFeO₃ epitaxial films. By substituting Fe with Co in BiFeO₃, the magnetization at room temperature increased to 20 emu/cm³. This result suggests that Co-substituted BiFeO₃ films can be used in spin-filter devices.

摘要

通过射频磁控溅射在具有001Co - BiFeO₃//001SrTiO₃外延关系的SrTiO₃(100)衬底上成功制备了厚度为50 nm的10 at.% Co取代的BiFeO₃薄膜。在本研究中,通过射频磁控溅射制备了单相Co取代的BiFeO₃外延薄膜。系统地改变了诸如Ar、O₂气体压力、退火温度、退火气氛和溅射功率等溅射条件。观察到低Ar气体压力和低溅射功率对于抑制BiO第二相的形成是必要的。Co取代的BiFeO₃薄膜在空气中600℃进行后退火结晶。单相薄膜的工艺窗口比纯BiFeO₃外延薄膜的窄。通过在BiFeO₃中用Co取代Fe,室温下的磁化强度增加到20 emu/cm³。该结果表明Co取代的BiFeO₃薄膜可用于自旋过滤器件。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/f5f730f297ca/materials-04-01087-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/e4374b3faf3d/materials-04-01087-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/4c389289deb5/materials-04-01087-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/1d04223104aa/materials-04-01087-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/b7c3a56fb6a1/materials-04-01087-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/f5f730f297ca/materials-04-01087-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/e4374b3faf3d/materials-04-01087-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/4c389289deb5/materials-04-01087-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/1d04223104aa/materials-04-01087-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/b7c3a56fb6a1/materials-04-01087-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/8305/5448640/f5f730f297ca/materials-04-01087-g005.jpg

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本文引用的文献

1
Electrical control of antiferromagnetic domains in multiferroic BiFeO3 films at room temperature.室温下多铁性BiFeO₃薄膜中反铁磁畴的电控制
Nat Mater. 2006 Oct;5(10):823-9. doi: 10.1038/nmat1731. Epub 2006 Sep 3.
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Epitaxial BiFeO3 multiferroic thin film heterostructures.外延BiFeO₃多铁性薄膜异质结构
Science. 2003 Mar 14;299(5613):1719-22. doi: 10.1126/science.1080615.