John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, 02139, MA, USA.
Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), Singapore, 138634, Singapore.
Nat Commun. 2023 Mar 27;14(1):1496. doi: 10.1038/s41467-023-36870-w.
Integrated electro-optic (EO) modulators are fundamental photonics components with utility in domains ranging from digital communications to quantum information processing. At telecommunication wavelengths, thin-film lithium niobate modulators exhibit state-of-the-art performance in voltage-length product (VL), optical loss, and EO bandwidth. However, applications in optical imaging, optogenetics, and quantum science generally require devices operating in the visible-to-near-infrared (VNIR) wavelength range. Here, we realize VNIR amplitude and phase modulators featuring VL's of sub-1 V ⋅ cm, low optical loss, and high bandwidth EO response. Our Mach-Zehnder modulators exhibit a VL as low as 0.55 V ⋅ cm at 738 nm, on-chip optical loss of ~0.7 dB/cm, and EO bandwidths in excess of 35 GHz. Furthermore, we highlight the opportunities these high-performance modulators offer by demonstrating integrated EO frequency combs operating at VNIR wavelengths, with over 50 lines and tunable spacing, and frequency shifting of pulsed light beyond its intrinsic bandwidth (up to 7x Fourier limit) by an EO shearing method.
集成电光(EO)调制器是一种基本的光子学组件,在从数字通信到量子信息处理的各个领域都有应用。在电信波长下,薄膜铌酸锂调制器在电压-长度积(VL)、光损耗和 EO 带宽方面表现出了最先进的性能。然而,在光学成像、光遗传学和量子科学中的应用通常需要在可见光到近红外(VNIR)波长范围内工作的器件。在这里,我们实现了 VNIR 振幅和相位调制器,其 VL 低至 1 V ⋅ cm,光损耗低,EO 响应带宽高。我们的马赫-曾德尔调制器在 738nm 时的 VL 低至 0.55 V ⋅ cm,片上光损耗约为 0.7dB/cm,EO 带宽超过 35GHz。此外,我们通过演示在 VNIR 波长下工作的集成 EO 频率梳,突出了这些高性能调制器所提供的机会,频率梳具有超过 50 条线和可调谐间距,以及通过 EO 剪切方法对脉冲光进行频率移动,超出其固有带宽(高达 7 倍傅里叶极限)。