Department of Chemistry and Chemical Biology, Cornell University , Ithaca, New York 14853, United States.
Department of Chemistry, Institute for Molecular Engineering, and Frank Institute, University of Chicago , Chicago, Illinois 60637, United States.
Nano Lett. 2017 Oct 11;17(10):5962-5968. doi: 10.1021/acs.nanolett.7b01986. Epub 2017 Sep 20.
High quality electrical contact to semiconducting transition metal dichalcogenides (TMDCs) such as MoS is key to unlocking their unique electronic and optoelectronic properties for fundamental research and device applications. Despite extensive experimental and theoretical efforts reliable ohmic contact to doped TMDCs remains elusive and would benefit from a better understanding of the underlying physics of the metal-TMDC interface. Here we present measurements of the atomic-scale energy band diagram of junctions between various metals and heavily doped monolayer MoS using ultrahigh vacuum scanning tunneling microscopy (UHV-STM). Our measurements reveal that the electronic properties of these junctions are dominated by two-dimensional metal-induced gap states (MIGS). These MIGS are characterized by a spatially growing measured gap in the local density of states (L-DOS) of the MoS within 2 nm of the metal-semiconductor interface. Their decay lengths extend from a minimum of ∼0.55 nm near midgap to as long as 2 nm near the band edges and are nearly identical for Au, Pd, and graphite contacts, indicating that it is a universal property of the monolayer semiconductor. Our findings indicate that even in heavily doped semiconductors, the presence of MIGS sets the ultimate limit for electrical contact.
高质量的电接触半导体过渡金属二卤化物(TMDCs),如 MoS,是解锁其独特的电子和光电特性用于基础研究和器件应用的关键。尽管已经进行了广泛的实验和理论研究,但对于掺杂 TMDCs 的可靠欧姆接触仍然难以实现,并且需要更好地了解金属-TMDC 界面的基础物理学。在这里,我们使用超高真空扫描隧道显微镜(UHV-STM)测量了各种金属和重掺杂单层 MoS 之间结的原子级能带图。我们的测量结果表明,这些结的电子特性主要由二维金属诱导能隙态(MIGS)决定。这些 MIGS 的特征是在金属-半导体界面附近 2nm 范围内 MoS 的局部密度态(L-DOS)中测量的间隙空间增长。它们的衰减长度从近隙处的最小值约 0.55nm 延伸到带边缘处的 2nm,并且对于 Au、Pd 和石墨接触几乎相同,这表明这是单层半导体的普遍特性。我们的发现表明,即使在重掺杂半导体中,MIGS 的存在也设定了电接触的最终极限。