Hannonen Antti, Friberg Ari T, Setälä Tero
J Opt Soc Am A Opt Image Sci Vis. 2017 Aug 1;34(8):1360-1368. doi: 10.1364/JOSAA.34.001360.
We introduce a novel approach for the spectral characterization of inhomogeneous thin films and interfaces by means of an imaging ghost ellipsometer operating with classical light of Gaussian statistics. We show that the device output in general provides the ellipsometric information associated with the fractional Fourier transforms of the sample's reflection coefficients, which in special cases reduce to the Fourier transforms or images. The formalisms for both one-dimensional and two-dimensional samples are presented. The method is insensitive to instrumentation errors and, unlike in traditional ellipsometry, no source or detector calibration is needed.
我们介绍了一种通过使用具有高斯统计特性的经典光的成像式鬼椭圆偏振仪，对非均匀薄膜和界面进行光谱表征的新方法。我们表明，该设备的输出通常提供与样品反射系数的分数傅里叶变换相关的椭圆偏振信息，在特殊情况下可简化为傅里叶变换或图像。给出了一维和二维样品的形式体系。该方法对仪器误差不敏感，并且与传统椭圆偏振法不同，无需对光源或探测器进行校准。
