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基于离散空洞形成的倒装芯片焊点电迁移失效机制

Electromigration Mechanism of Failure in Flip-Chip Solder Joints Based on Discrete Void Formation.

作者信息

Chang Yuan-Wei, Cheng Yin, Helfen Lukas, Xu Feng, Tian Tian, Scheel Mario, Di Michiel Marco, Chen Chih, Tu King-Ning, Baumbach Tilo

机构信息

Institute for Photon Science and Synchrotron Radiation (IPS), Karlsruhe Institute of Technology (KIT), Eggenstein-Leopoldshafen, 76344, Germany.

Department of Materials Science and Engineering, National Chiao Tung University, Hsin-chu, 30010, Taiwan, R.O.C..

出版信息

Sci Rep. 2017 Dec 20;7(1):17950. doi: 10.1038/s41598-017-06250-8.

Abstract

In this investigation, SnAgCu and SN100C solders were electromigration (EM) tested, and the 3D laminography imaging technique was employed for in-situ observation of the microstructure evolution during testing. We found that discrete voids nucleate, grow and coalesce along the intermetallic compound/solder interface during EM testing. A systematic analysis yields quantitative information on the number, volume, and growth rate of voids, and the EM parameter of DZ*. We observe that fast intrinsic diffusion in SnAgCu solder causes void growth and coalescence, while in the SN100C solder this coalescence was not significant. To deduce the current density distribution, finite-element models were constructed on the basis of the laminography images. The discrete voids do not change the global current density distribution, but they induce the local current crowding around the voids: this local current crowding enhances the lateral void growth and coalescence. The correlation between the current density and the probability of void formation indicates that a threshold current density exists for the activation of void formation. There is a significant increase in the probability of void formation when the current density exceeds half of the maximum value.

摘要

在本研究中,对SnAgCu和SN100C焊料进行了电迁移(EM)测试,并采用三维层造影成像技术对测试过程中的微观结构演变进行原位观察。我们发现,在电迁移测试过程中,离散空洞沿金属间化合物/焊料界面形核、生长并合并。系统分析得出了关于空洞数量、体积、生长速率以及DZ*电迁移参数的定量信息。我们观察到,SnAgCu焊料中的快速本征扩散导致空洞生长和合并,而在SN100C焊料中,这种合并并不显著。为了推导电流密度分布,基于层造影图像构建了有限元模型。离散空洞不会改变全局电流密度分布,但它们会在空洞周围引起局部电流聚集:这种局部电流聚集会增强空洞的横向生长和合并。电流密度与空洞形成概率之间的相关性表明,存在一个激活空洞形成的阈值电流密度。当电流密度超过最大值的一半时,空洞形成的概率会显著增加。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5335/5738397/bd95f060cacb/41598_2017_6250_Fig1_HTML.jpg

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