Castañeda Raul, Garcia-Sucerquia Jorge
Appl Opt. 2018 Jan 1;57(1):A12-A18. doi: 10.1364/AO.57.000A12.
In this work, an off-axis digital holographic microscope operating in reflection mode and a telecentric regimen to produce 3D topography of a microscopy sample is shown. The main characteristics of the proposed method, which make it different from the previous works in the field, are the possibility of producing the 3D topography by a single shot over the complete field of view with sensitivity of λ/100, without phase perturbations introduced by the illuminating-imaging system, and with no further numerical processing beyond that required for recovering the phase map of the sample. A complete analysis of the illuminating-imaging system of the digital holographic microscope is presented. The proposed digital holographic microscope is tested on imaging a USAF resolution test target and some micro-electromechanical systems (MEMs).
在这项工作中，展示了一种在反射模式下工作且采用远心光路的离轴数字全息显微镜，用于生成显微镜样本的三维形貌。该方法的主要特点使其有别于该领域以前的工作，这些特点包括能够在整个视场单次拍摄生成三维形貌，灵敏度达到λ/100，不会引入由照明 - 成像系统产生的相位扰动，并且除了恢复样本相位图所需的处理外无需进一步的数值处理。文中给出了对数字全息显微镜照明 - 成像系统的完整分析。所提出的数字全息显微镜在对美国空军分辨率测试靶标和一些微机电系统（MEMS）成像时进行了测试。
