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氧溅射压力对用于气体传感应用的ZnO薄膜的结构、形貌和光学性能的影响

Effect of Oxygen Sputter Pressure on the Structural, Morphological and Optical Properties of ZnO Thin Films for Gas Sensing Application.

作者信息

Fairose S, Ernest Suhashini, Daniel Samson

机构信息

1PG & Research Department of Physics, Urumu Dhanalakshmi College, Trichy, Tamil Nadu 620 019 India.

2PG & Research Department of Physics, Bharathidasan University, Trichy, Tamil Nadu 620 024 India.

出版信息

Sens Imaging. 2018;19(1):1. doi: 10.1007/s11220-017-0184-5. Epub 2017 Dec 29.

DOI:10.1007/s11220-017-0184-5
PMID:29354023
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5747580/
Abstract

ZnO thin films were prepared on glass substrates at low (5 × 10 mbar) and high (3 × 10 mbar) sputter pressure using dc reactive magnetron sputtering. The structural, morphological, compositional and optical properties of the thin films were investigated. XRD patterns of both films confirmed the polycrystalline nature of the films with hexagonal Wurtzite structure. SEM study indicates that the surface of the film formed at high sputter pressure was more uniform, compact and porous in nature. From the EDAX analysis, no other characteristic peaks of other impurities were observed and the formation of single phase of ZnO was confirmed. From the study of photoluminescence, three peaks were observed, one strong near band-edge emission at 390 nm followed by weak and broad visible emissions around 420-480 nm. Room temperature ammonia sensing characteristics of ZnO nanothin films formed at higher sputter pressure were studied for different ammonia vapour concentration levels. The response of the Ammonia sensor at room temperature (30 °C) operation was observed to be of high sensitivity with quick response and recovery times.

摘要

采用直流反应磁控溅射法，在低溅射压力（5×10毫巴）和高溅射压力（3×10毫巴）下，在玻璃衬底上制备了氧化锌薄膜。对薄膜的结构、形态、成分和光学性质进行了研究。两种薄膜的X射线衍射图谱均证实了薄膜具有六方纤锌矿结构的多晶性质。扫描电子显微镜研究表明，在高溅射压力下形成的薄膜表面更均匀、致密且具有多孔性。通过能谱分析，未观察到其他杂质的特征峰，证实了氧化锌单相的形成。通过光致发光研究，观察到三个峰，一个在390纳米处有较强的近带边发射，随后在420 - 480纳米左右有较弱且较宽的可见发射。研究了在较高溅射压力下形成的氧化锌纳米薄膜在不同氨蒸气浓度水平下的室温氨气传感特性。观察到氨气传感器在室温（30℃）下工作时具有高灵敏度、快速响应和恢复时间。

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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2135/5747580/99a73e20de5c/11220_2017_184_Fig7_HTML.jpg
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