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可调谐激光干涉光刻制备用于 SERS 的等离子体纳米粒子阵列。

Tunable laser interference lithography preparation of plasmonic nanoparticle arrays tailored for SERS.

机构信息

Biosensor Technologies, AIT-Austrian Institute of Technology GmbH, Konrad-Lorenz-Strasse 24, 3430 Tulln, Austria.

出版信息

Nanoscale. 2018 May 31;10(21):10268-10276. doi: 10.1039/c7nr08905h.

DOI:10.1039/c7nr08905h
PMID:29790495
Abstract

The facile preparation of arrays of plasmonic nanoparticles over a square centimeter surface area is reported. The developed method relies on tailored laser interference lithography (LIL) that is combined with dry etching and it offers means for the rapid fabrication of periodic arrays of metallic nanostructures with well controlled morphology. Adjusting the parameters of the LIL process allows for the preparation of arrays of nanoparticles with a diameter below hundred nanometers independently of their lattice spacing. Gold nanoparticle arrays were precisely engineered to support localized surface plasmon resonance (LSPR) with different damping at desired wavelengths in the visible and near infrared part of the spectrum. The applicability of these substrates for surface enhanced Raman scattering is demonstrated where cost-effective, uniform and reproducible substrates are of paramount importance. The role of deviations in the spectral position and the width of the LSPR band affected by slight variations of plasmonic nanostructures is discussed.

摘要

报道了一种在一平方厘米面积上制备等离子体纳米粒子阵列的简便方法。所开发的方法依赖于经过精心设计的激光干涉光刻(LIL),它结合了干法刻蚀,为快速制备具有良好控制形态的周期性金属纳米结构阵列提供了手段。调整 LIL 工艺的参数可以制备直径低于一百纳米的纳米粒子阵列,而与它们的晶格间距无关。金纳米粒子阵列被精确设计为在可见和近红外光谱的期望波长处支持局部表面等离子体共振(LSPR),具有不同的阻尼。这些衬底在表面增强拉曼散射中的应用得到了证明,在这种应用中,具有成本效益、均匀和可重复的衬底至关重要。讨论了由等离子体纳米结构的微小变化引起的 LSPR 带的光谱位置和宽度的偏差的作用。

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