Nakajima Yasutaka, Hayashi Shuichiro, Katayama Akito, Nedyalkov Nikolay, Terakawa Mitsuhiro
School of Integrated Design Engineering, Keio University, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan.
Department of Electronics and Electrical Engineering, Keio University, 3-14-1, Hiryoshi, Kohoku-ku, Yokohama 223-8522, Japan.
Nanomaterials (Basel). 2018 Jul 22;8(7):558. doi: 10.3390/nano8070558.
In this paper, we experimentally demonstrate femtosecond laser direct writing of conductive structures on the surface of native polydimethylsiloxane (PDMS). Irradiation of femtosecond laser pulses modified the PDMS to black structures, which exhibit electrical conductivity. Fourier-transform infrared (FTIR) and X-ray diffraction (XRD) results show that the black structures were composed of β-silicon carbide (β-SiC), which can be attributed to the pyrolysis of the PDMS. The electrical conductivity was exhibited in limited laser power and scanning speed conditions. The technique we present enables the spatially selective formation of β-SiC on the surface of native PDMS only by irradiation of femtosecond laser pulses. Furthermore, this technique has the potential to open a novel route to simply fabricate flexible/stretchable MEMS devices with SiC microstructures.
在本文中，我们通过实验证明了在天然聚二甲基硅氧烷（PDMS）表面进行飞秒激光直接写入导电结构。飞秒激光脉冲辐照使PDMS转变为黑色结构，该结构具有导电性。傅里叶变换红外（FTIR）和X射线衍射（XRD）结果表明，黑色结构由β-碳化硅（β-SiC）组成，这可归因于PDMS的热解。在有限的激光功率和扫描速度条件下表现出导电性。我们提出的这项技术仅通过飞秒激光脉冲辐照就能在天然PDMS表面实现β-SiC的空间选择性形成。此外，该技术有可能开辟一条简单制造具有SiC微结构的柔性/可拉伸微机电系统（MEMS）器件的新途径。
