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关于在表面纹理测量中使用接触式和共聚焦显微镜方法的一些思考。

Some Considerations about the Use of Contact and Confocal Microscopy Methods in Surface Texture Measurement.

作者信息

García Jesús Caja, Sanz Lobera Alfredo, Maresca Piera, Pareja Teresa Fernández, Wang Chen

机构信息

Department of Mechanical, Chemical and Industrial Design Engineering, ETS Ingeniería y Diseño Industrial, Universidad Politécnica de Madrid, Ronda de Valencia, 3, 28012 Madrid, Spain.

Department of Aerospace Materials and Production, ETSI Aeronáutica y del Espacio, Universidad Politécnica de Madrid, Plaza del Cardenal Cisneros, 3, 28040 Madrid, Spain.

出版信息

Materials (Basel). 2018 Aug 20;11(8):1484. doi: 10.3390/ma11081484.

DOI:10.3390/ma11081484
PMID:30127320
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6119953/
Abstract

Surface metrology employs various measurement techniques, among which there has been an increase of noteworthy research into non-contact optical and contact stylus methods. However, some deeper considerations about their differentiation and compatibility are still lacking and necessary. This work compares the measurement characteristics of the confocal microscope with the portable stylus profilometer instrumentation, from a metrological point of view (measurement precision and accuracy, and complexity of algorithms for data processing) and an operational view (measuring ranges, measurement speed, environmental and operational requirements, and cost). Mathematical models and algorithms for roughness parameters calculation and their associated uncertainties evaluation are developed and validated. The experimental results demonstrate that the stylus profilometer presents the most reliable measurement with the highest measurement speed and the least complex algorithms, while the image confocal method takes advantage of higher vertical and horizontal resolution when compared with the employed stylus profilometer.

摘要

表面计量学采用多种测量技术，其中对非接触光学方法和接触式触针方法的研究显著增加。然而，对于它们的差异和兼容性仍缺乏一些深入的考量，而这些考量是必要的。从计量学角度（测量精度和准确性以及数据处理算法的复杂性）和操作角度（测量范围、测量速度、环境和操作要求以及成本）出发，本文比较了共聚焦显微镜与便携式触针轮廓仪的测量特性。开发并验证了用于粗糙度参数计算的数学模型和算法及其相关不确定度评估。实验结果表明，触针轮廓仪具有最可靠的测量结果，测量速度最高且算法最不复杂，而与所使用的触针轮廓仪相比，图像共聚焦方法具有更高的垂直和水平分辨率。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/238578e50a75/materials-11-01484-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/99917a99b86b/materials-11-01484-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/e4d8f27e0795/materials-11-01484-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/c199ac1b190a/materials-11-01484-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/476fad64d741/materials-11-01484-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/7e2333829e4a/materials-11-01484-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/444a15f7ad08/materials-11-01484-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/238578e50a75/materials-11-01484-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/99917a99b86b/materials-11-01484-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/e4d8f27e0795/materials-11-01484-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/c199ac1b190a/materials-11-01484-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/476fad64d741/materials-11-01484-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/7e2333829e4a/materials-11-01484-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/444a15f7ad08/materials-11-01484-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e4c/6119953/238578e50a75/materials-11-01484-g007.jpg

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