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触针式仪器与共聚焦显微镜表面粗糙度比较结果。

Results of a Surface Roughness Comparison between Stylus Instruments and Confocal Microscopes.

作者信息

Mínguez-Martínez Alberto, Maresca Piera, Caja Jesús, Oliva Jesús de Vicente Y

机构信息

Centro Láser, Universidad Politécnica de Madrid, Alan Turing 1, 28038 Madrid, Spain.

Laboratorio de Metrología y Metrotecnia (LMM), Escuela Técnica Superior de Ingeniería Industrial, Universidad Politécnica de Madrid, José Gutiérrez Abascal, 2, 28006 Madrid, Spain.

出版信息

Materials (Basel). 2022 Aug 10;15(16):5495. doi: 10.3390/ma15165495.

DOI:10.3390/ma15165495
PMID:36013632
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9410296/
Abstract

This article presents the results of an LMM-R-2019 interlaboratory comparison. Such comparisons of different families of measuring instruments are one of the activities conducted among the calibration laboratories to maintain their ISO 17025 accreditation. Given that the study of surface roughness is becoming increasingly important in the field of dimensional metrology, the comparison focused on determining the Ra parameter on a pseudorandom metallic roughness standard using two types of measuring instruments: physical contact (stylus instruments) and optical (confocal microscopes). Among the aspects studied was whether the roughness measurements obtained using calibrated confocal microscopes could be compared with those using traditional methods since optical instruments obtain measurements more quickly and responsively than do stylus instruments. The results showed that roughness measurements using confocal microscopes are comparable with those from a traditional stylus instrument.

摘要

本文介绍了LMM-R-2019实验室间比对的结果。不同系列测量仪器的此类比对是校准实验室为维持ISO 17025认可而开展的活动之一。鉴于表面粗糙度研究在尺寸计量领域日益重要,此次比对聚焦于使用两种测量仪器在伪随机金属粗糙度标准上测定Ra参数:物理接触式(触针式仪器)和光学式(共聚焦显微镜)。研究的方面包括,使用校准后的共聚焦显微镜获得的粗糙度测量结果是否可与使用传统方法获得的结果相比较,因为光学仪器比触针式仪器获取测量结果的速度更快且响应更迅速。结果表明,使用共聚焦显微镜进行的粗糙度测量结果与传统触针式仪器的测量结果具有可比性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/8651ba116f8c/materials-15-05495-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/f72129147b6e/materials-15-05495-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/19e7c0ec4d54/materials-15-05495-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/2a0d14ea34e1/materials-15-05495-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/b56f2c871a88/materials-15-05495-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/c1df192668d3/materials-15-05495-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/48b343e4b82b/materials-15-05495-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/8651ba116f8c/materials-15-05495-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/f72129147b6e/materials-15-05495-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/19e7c0ec4d54/materials-15-05495-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/2a0d14ea34e1/materials-15-05495-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/b56f2c871a88/materials-15-05495-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/c1df192668d3/materials-15-05495-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/48b343e4b82b/materials-15-05495-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6375/9410296/8651ba116f8c/materials-15-05495-g007.jpg

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3D Parametric and Nonparametric Description of Surface Topography in Manufacturing Processes.制造过程中表面形貌的三维参数化和非参数化描述
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Procedure for Calibrating the Z-axis of a Confocal Microscope: Application for the Evaluation of Structured Surfaces.共聚焦显微镜 Z 轴校准程序:在评估结构表面中的应用。
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