IBM Research, Rio de Janeiro, RJ, 22290-240, Brazil.
IBM Research, Yorktown Heights, NY, 10598, USA.
Nat Commun. 2018 Oct 5;9(1):4095. doi: 10.1038/s41467-018-06604-4.
Directed placement of solution-based nanomaterials at predefined locations with nanoscale precision limits bottom-up integration in semiconductor process technology. We report a method for electric-field-assisted placement of nanomaterials from solution by means of large-scale graphene layers featuring nanoscale deposition sites. The structured graphene layers are prepared via either transfer or synthesis on standard substrates, and then are removed once nanomaterial deposition is completed, yielding material assemblies with nanoscale resolution that cover surface areas >1 mm. In order to demonstrate the broad applicability, we have assembled representative zero-dimensional, one-dimensional, and two-dimensional semiconductors at predefined substrate locations and integrated them into nanoelectronic devices. Ultimately, this method opens a route to bottom-up integration of nanomaterials for industry-scale applications.
通过在大面积石墨烯层上采用纳米级沉积位点的方法,实现了电场辅助从溶液中定向放置纳米材料,从而实现了纳米级精度的预定位点,这限制了自下而上的半导体工艺技术集成。我们报告了一种利用大面积石墨烯层通过电场辅助从溶液中定向放置纳米材料的方法,其特征在于纳米级沉积位点。结构化的石墨烯层可以通过转移或在标准衬底上合成来制备,然后在纳米材料沉积完成后去除,从而得到具有纳米级分辨率的材料组装体,其覆盖面积大于 1mm。为了展示其广泛的适用性,我们已经在预定的衬底位置上组装了具有代表性的零维、一维和二维半导体,并将其集成到纳米电子器件中。最终,这种方法为纳米材料的自下而上集成开辟了一条用于工业规模应用的途径。