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无线无源LC温度与应变双参数传感器

Wireless Passive LC Temperature and Strain Dual-Parameter Sensor.

作者信息

Wang Ya, Tan Qiulin, Zhang Lei, Lin Baimao, Li Meipu, Fan Zhihong

机构信息

Science and Technology on Electronic Test and Measurement Laboratory, North University of China,Taiyuan 030051, China.

出版信息

Micromachines (Basel). 2020 Dec 30;12(1):34. doi: 10.3390/mi12010034.

Abstract

There is an increasing demand for bearing temperature and strain monitoring in high-speed rotating systems. This study proposes a new multiresonance, multiplexing, wireless, passive inductance capacitance (LC) temperature and strain sensor. The sensor has two capacitors connected at different locations (turns) on the same inductor to achieve simultaneous temperature and strain measurements. The plate capacitor is connected to the inner part of the inductor and the other interdigital capacitor is connected to the outer part of the inductor to form two LC loops. The structure of the sensor is optimized through High Frequency Structure Simulator (HFSS) simulations to realize frequency separation of the two parameters and avoid mutual interference between the two signals. The sensor is fabricated on a polyimide film using electroplating technology. The experimental results show that the temperature-strain sensor can operate stably from 25 °C to 85 °C with an average sensitivity of 27.3 kHz/°C within this temperature range. The sensor can detect strains in the range of 1000-5000 με with a strain sensitivity of 100 Hz/με at 25 °C. Therefore, the proposed wireless passive LC temperature-strain sensor exhibits stable performance. In addition, the use of a single inductor effectively reduces the sensor's area. The flexible substrate provides advantageous surface conformal attachment characteristics suitable for monitoring high-temperature rotating parts in adverse environments.

摘要

高速旋转系统中对轴承温度和应变监测的需求日益增加。本研究提出了一种新型的多谐振、复用、无线、无源电感电容(LC)温度和应变传感器。该传感器在同一电感的不同位置(匝数)连接有两个电容器,以实现温度和应变的同时测量。平板电容器连接到电感的内部,另一个叉指电容器连接到电感的外部,形成两个LC回路。通过高频结构模拟器(HFSS)仿真对传感器结构进行了优化,以实现两个参数的频率分离,避免两个信号之间的相互干扰。该传感器采用电镀技术制作在聚酰亚胺薄膜上。实验结果表明,温度-应变传感器在25℃至85℃范围内能稳定工作,在此温度范围内平均灵敏度为27.3kHz/℃。该传感器在25℃时能检测1000 - 5000με范围内的应变,应变灵敏度为100Hz/με。因此,所提出的无线无源LC温度-应变传感器具有稳定的性能。此外,使用单个电感有效地减小了传感器的面积。柔性基板提供了有利的表面贴合附着特性,适用于在恶劣环境中监测高温旋转部件。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e55/7823390/5b27817d78fb/micromachines-12-00034-g001.jpg

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