Klingner N, Heller R, Hlawacek G, Facsko S, von Borany J
Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, Dresden 01328, Germany.
Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstr. 400, Dresden 01328, Germany.
Ultramicroscopy. 2019 Mar;198:10-17. doi: 10.1016/j.ultramic.2018.12.014. Epub 2018 Dec 24.
A helium ion microscope, known for high resolution imaging and modification with helium or neon ions, has been equipped with a time-of-flight spectrometer for compositional analysis. Here we report on its design, implementation and show first results of this powerful add-on. Our design considerations were based on the results of detailed ion collision cascade simulations that focus on the physically achievable resolution for various detection limits. Different secondary ion extraction geometries and spectrometer types are considered and compared with respect to the demands and limitations of the microscope. As a result the development and evaluation of a secondary ion extraction optics and time-of-flight spectrometer that allows the parallel measurement of all secondary ion masses is reported. First experimental results demonstrate an excellent mass resolution as well as high-resolution secondary ion imaging capabilities with sub-8 nm lateral resolution. The combination of high resolution secondary electron images and mass-separated sputtered ion distributions have a high potential to answer open questions in microbiology, cell biology, earth sciences and materials research.
一种以高分辨率成像以及能用氦离子或氖离子进行修饰而闻名的氦离子显微镜，已配备了用于成分分析的飞行时间光谱仪。在此，我们报告其设计、实现情况，并展示这一强大附加装置的初步结果。我们的设计考量基于详细的离子碰撞级联模拟结果，这些模拟聚焦于针对各种检测限在物理上可实现的分辨率。针对显微镜的要求和限制，考虑并比较了不同的二次离子提取几何结构和光谱仪类型。结果报告了一种二次离子提取光学器件和飞行时间光谱仪的开发与评估情况，该光谱仪能够并行测量所有二次离子质量。初步实验结果证明了出色的质量分辨率以及具有亚8纳米横向分辨率的高分辨率二次离子成像能力。高分辨率二次电子图像与经质量分离的溅射离子分布相结合，在解答微生物学、细胞生物学、地球科学和材料研究中的悬而未决问题方面具有很大潜力。
