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基于晶粒结构模型的高性能氧化铜可见光光电探测器。

High-Performance Copper Oxide Visible-Light Photodetector via Grain-Structure Model.

作者信息

Song Hyeon-Joo, Seo Min-Ho, Choi Kwang-Wook, Jo Min-Seung, Yoo Jae-Young, Yoon Jun-Bo

机构信息

School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.

Information & Electronics Research Institute Korea Advanced Institute of Science and Technology (KAIST), 291, Daehak-ro, Yuseong-gu, Daejeon, 34141, Republic of Korea.

出版信息

Sci Rep. 2019 May 14;9(1):7334. doi: 10.1038/s41598-019-43667-9.

Abstract

Recently, copper oxide (CuO)-based visible-light photodetectors have attracted great interest due to their narrow bandgap (1.2 eV), low cost, and ease of fabrication. However, there has been insufficient theoretical analysis and study of CuO-based photodetectors, resulting in inferior performance in terms of responsivity, detectivity, and response speed. This work develops a method to enhance the performance of CuO photodetectors by engineering a grain structure based on a newly-developed theoretical model. In the developed theoretical grain-structure model, the grain size and the connections between grains are considered because they can strongly affect the optoelectronic characteristics of CuO photodetectors. Based upon the proposed model, the engineered CuO device achieves enhanced optoelectronic performance. The engineered device shows high responsivity of 15.3 A/W and detectivity of 1.08 × 10 Jones, which are 18 and 50 times better than those of the unoptimized device, and also shows fast rising and decaying response speeds of 0.682 s and 1.77 s, respectively. In addition, the proposed method is suitable for the mass-production of performance-enhanced, reliable photodetectors. By using a conventional semiconductor fabrication process, a photodetector-array is demonstrated on a 4-inch wafer. The fabricated devices show uniform, high, and stable optoelectronic performance for a month.

摘要

最近,基于氧化铜(CuO)的可见光光电探测器因其窄带隙(1.2 eV)、低成本和易于制造而备受关注。然而,对基于CuO的光电探测器的理论分析和研究还不够充分,导致其在响应度、探测率和响应速度方面性能较差。这项工作基于新开发的理论模型,通过设计晶粒结构来开发一种提高CuO光电探测器性能的方法。在开发的理论晶粒结构模型中,考虑了晶粒尺寸和晶粒之间的连接,因为它们会强烈影响CuO光电探测器的光电特性。基于所提出的模型,经过设计的CuO器件实现了增强的光电性能。该器件显示出15.3 A/W的高响应度和1.08×10琼斯的探测率,分别比未优化的器件高18倍和50倍,并且还显示出快速的上升和衰减响应速度,分别为0.682 s和1.77 s。此外,所提出的方法适用于大规模生产性能增强、可靠的光电探测器。通过使用传统的半导体制造工艺,在4英寸晶圆上展示了一个光电探测器阵列。所制造的器件在一个月内表现出均匀、高且稳定的光电性能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b265/6517403/167fed57d559/41598_2019_43667_Fig1_HTML.jpg

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