Li Yucheng, Zhou Xiaoqin, Liu Qiang
Appl Opt. 2021 Feb 1;60(4):851-863. doi: 10.1364/AO.413073.
Small-surface optical components with complex shapes and high-precision requirements are increasingly needed in the fields of mobile communications, in vivo diagnosis, and other fields. Some scholars have studied and proposed a two-dimensional vibration actuated polishing (2D-VAP) method based on small polishing tools for the preparation of small-surface optical elements. Using the nonresonant 2D-VAP device developed by the author, the frequency and amplitude of 2D-VAP are precisely adjusted to generate a random-like Lissajous polishing trajectory, which can overcome the problem that most of the existing 2D-VAP methods generate a circular or elliptical polishing trajectory at the small polishing tool, resulting in leaving periodic polishing marks on the workpiece surface. The removal function model under the condition of random-like Lissajous polishing motion with a small polishing tool is established. In addition, the removal function verification experiments and surface polishing experiments are carried out. The experimental results show that the measured removal function is in good agreement with that obtained by numerical simulation. Compared with the circular polishing trajectory, the random-like Lissajous polishing trajectory can significantly improve the material removal rate, and there are no obvious periodic polishing marks on the workpiece surface.
在移动通信、体内诊断等领域，对具有复杂形状和高精度要求的小表面光学元件的需求日益增加。一些学者针对小表面光学元件的制备，研究并提出了一种基于小型抛光工具的二维振动驱动抛光（2D-VAP）方法。利用作者开发的非共振2D-VAP装置，精确调整2D-VAP的频率和振幅，以生成类似随机的李萨如抛光轨迹，这可以克服现有的大多数2D-VAP方法在小型抛光工具处产生圆形或椭圆形抛光轨迹，从而在工件表面留下周期性抛光痕迹的问题。建立了小型抛光工具在类似随机李萨如抛光运动条件下的去除函数模型。此外，进行了去除函数验证实验和表面抛光实验。实验结果表明，测量得到的去除函数与数值模拟得到的结果吻合良好。与圆形抛光轨迹相比，类似随机的李萨如抛光轨迹可以显著提高材料去除率，并且工件表面没有明显的周期性抛光痕迹。
