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关于MPU6050加速度计的声学注入研究。

Investigation of Acoustic Injection on the MPU6050 Accelerometer.

作者信息

Zhang Yunfan, Li Hui, Shen Shengnan, Zhang Guohao, Yang Yun, Liu Zefeng, Xie Qisen, Gao Chaofu, Zhang Pengfei, Zhao Wu

机构信息

School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China.

Key Laboratory of Hydraulic Machinery Transients, Ministry of Education, Wuhan University, Wuhan 430072, China.

出版信息

Sensors (Basel). 2019 Jul 12;19(14):3083. doi: 10.3390/s19143083.

DOI:10.3390/s19143083
PMID:31336934
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6679069/
Abstract

Acoustic injection is one of the most dangerous ways of causing micro-electro-mechanical systems (MEMS) failures. In this paper, the failure mechanism of acoustic injection on the microprocessor unit 6050 (MPU6050) accelerometer is investigated by both experiment and simulation. A testing system was built to analyze the performance of the MPU6050 accelerometer under acoustic injection. A MEMS disassembly method was adopted and a MATLAB program was developed to establish the geometric model of MPU6050. Subsequently, a finite element model of MPU6050 was established. Then, the acoustic impacts on the sensor layer of MPU6050 were studied by acoustic-solid coupling simulations. The effects of sound frequencies, pressures and directions were analyzed. Simulation results are well agreed with the experiments which indicate that MPU6050 is most likely to fail under the sounds of 11,566 Hz. The failure mechanism of MPU6050 under acoustic injection is the relative shift of the capacitor flats caused by acoustic-solid resonance that make the sensor detect false signal and output error data. The stress is focused on the center linkage. MPU6050 can be reliable when the sound pressure is lower than 100 dB.

摘要

声学注入是导致微机电系统（MEMS）故障最危险的方式之一。本文通过实验和模拟研究了声学注入对微处理器单元6050（MPU6050）加速度计的失效机制。搭建了一个测试系统来分析声学注入下MPU6050加速度计的性能。采用了一种MEMS拆解方法并开发了一个MATLAB程序来建立MPU6050的几何模型。随后，建立了MPU6050的有限元模型。然后，通过声固耦合模拟研究了声学对MPU6050传感器层的影响。分析了声音频率、压力和方向的影响。模拟结果与实验结果吻合良好，表明MPU6050在11566 Hz的声音下最容易失效。声学注入下MPU6050的失效机制是声固共振导致电容器极板相对位移，使传感器检测到虚假信号并输出错误数据。应力集中在中心连杆上。当声压低于100 dB时，MPU6050可以可靠工作。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/1de362ba7cc0/sensors-19-03083-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/fd998fc4f85b/sensors-19-03083-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/4cad39fe7598/sensors-19-03083-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/ed79329c41ef/sensors-19-03083-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/8010cbf16881/sensors-19-03083-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/93eb029e352b/sensors-19-03083-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/eff2b8e14d21/sensors-19-03083-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/c0c9c8ef6018/sensors-19-03083-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/cd4dc8f4db02/sensors-19-03083-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/47f400832879/sensors-19-03083-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/3eb909c29e9f/sensors-19-03083-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/cb5357983a21/sensors-19-03083-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/3e04f66ecca6/sensors-19-03083-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/a62b7f72e894/sensors-19-03083-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/1de362ba7cc0/sensors-19-03083-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/fd998fc4f85b/sensors-19-03083-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/4cad39fe7598/sensors-19-03083-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/ed79329c41ef/sensors-19-03083-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/8010cbf16881/sensors-19-03083-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/93eb029e352b/sensors-19-03083-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/eff2b8e14d21/sensors-19-03083-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/c0c9c8ef6018/sensors-19-03083-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/cd4dc8f4db02/sensors-19-03083-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/47f400832879/sensors-19-03083-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/3eb909c29e9f/sensors-19-03083-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/cb5357983a21/sensors-19-03083-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/3e04f66ecca6/sensors-19-03083-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/a62b7f72e894/sensors-19-03083-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2abb/6679069/1de362ba7cc0/sensors-19-03083-g014.jpg

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