Krasnokutska Inna, Tambasco Jean-Luc J, Peruzzo Alberto
Quantum Photonics Laboratory and Centre for Quantum Computation and Communication Technology, School of Engineering, RMIT University, Melbourne, Victoria, 3000, Australia.
Sci Rep. 2019 Jul 31;9(1):11086. doi: 10.1038/s41598-019-47231-3.
Microring resonators are critical photonic components used in filtering, sensing and nonlinear applications. To date, the development of high performance microring resonators in LNOI has been limited by the sidewall angle, roughness and etch depth of fabricated rib waveguides. We present large free spectral range microring resonators patterned via electron beam lithography in high-index contrast Z-cut LNOI. Our microring resonators achieve an FSR greater than 5 nm for ring radius of 30 μm and a large 3 dB resonance bandwidth. We demonstrate 3 pm/V electro-optic tuning of a 70 μm-radius ring. This work will enable efficient on-chip filtering in LNOI and precede future, more complex, microring resonator networks and nonlinear field enhancement applications.
微环谐振器是用于滤波、传感和非线性应用的关键光子元件。迄今为止，基于绝缘体上铌酸锂（LNOI）的高性能微环谐振器的发展一直受到所制造的条形波导的侧壁角度、粗糙度和蚀刻深度的限制。我们展示了通过电子束光刻在高折射率对比度的Z切LNOI中制备的具有大自由光谱范围的微环谐振器。对于半径为30μm的微环谐振器，我们实现了大于5nm的自由光谱范围（FSR）以及较大的3dB谐振带宽。我们展示了半径为70μm的微环实现了3pm/V的电光调谐。这项工作将实现LNOI中的高效片上滤波，并为未来更复杂的微环谐振器网络和非线性场增强应用奠定基础。
