Gluschke J G, Richter F, Micolich A P
School of Physics, University of New South Wales, Sydney, NSW 2052, Australia.
Rev Sci Instrum. 2019 Aug;90(8):083901. doi: 10.1063/1.5099293.
We report on a parylene chemical vapor deposition system custom designed for producing ultrathin parylene films (5-100 nm thickness) for use as an electrical insulator in nanoscale electronic devices, including as the gate insulator in transistors. The system features a small deposition chamber that can be isolated and purged for process termination, a quartz crystal microbalance for monitoring deposition, and a rotating angled stage to increase coating conformity. The system was mostly built from off-the-shelf vacuum fittings allowing for easy modification and reduced cost compared to commercial parylene coating systems. The production of ultrathin parylene films for device applications is a niche not well catered to by commercial coating systems, which are typically designed to give thicker coatings (microns) with high uniformity over much larger areas. An added advantage of our design for nanoscale device applications is that the small deposition chamber is readily removable for transfer to a glovebox to enable parylene deposition onto pristine surfaces prepared in oxygen/water-free environments with minimal contamination.
我们报道了一种定制设计的聚对二甲苯化学气相沉积系统，该系统用于生产超薄聚对二甲苯薄膜（厚度为5 - 100纳米），用作纳米级电子器件中的电绝缘体，包括作为晶体管中的栅极绝缘体。该系统的特点是有一个小的沉积室，可进行隔离和吹扫以终止工艺；有一个石英晶体微天平用于监测沉积过程；还有一个旋转倾斜台以提高涂层的贴合度。该系统大部分由现成的真空配件构建而成，与商用聚对二甲苯涂层系统相比，便于修改且成本降低。用于器件应用的超薄聚对二甲苯薄膜的生产是一个商业涂层系统未很好满足的细分领域，商业涂层系统通常设计用于在大得多的区域上提供具有高均匀性的较厚涂层（微米级）。我们针对纳米级器件应用的设计的一个额外优势是，小的沉积室易于拆卸，以便转移到手套箱中，从而能够在污染最小的无氧/无水环境中制备的原始表面上沉积聚对二甲苯。
