Weber Mirco, Vorobev David, Viöl Wolfgang
Faculty of Enginering and Health, HAWK University of Applied Sciences and Arts, Von-Ossietzky-Straße 99/100, 37085 Göttingen, Germany.
Institute of Inorganic Chemistry, Georg August University of Göttingen, Tammannstraße 4, 37077 Göttingen, Germany.
Nanomaterials (Basel). 2022 Jul 24;12(15):2540. doi: 10.3390/nano12152540.
In this paper, a new approach for the synthesis of Parylene-metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources and energy compared with those using electron beam sputtering processes. The Parylene coatings were obtained after reduction plasma treatments with Parylene C. Therefore, a Parylene coating device with an included plasma microwave generator was used to ensure the character of a one-pot synthesis. This process provided ultra-thin metal salt layers in the range of 1-2 nm for layer thickness and 10-30 nm for larger metal salt agglomerates all over the metal salt layer. The Parylene layers were obtained with thicknesses between approx. 4.5 and 4.7 µm from ellipsometric measurements and 5.7-6.3 µm measured by white light reflectometry. Tensile strength analysis showed an orthogonal pulling stress resistance of around 4500 N. A surface roughness of 4-8 nm for the metal layers, as well as 20-29 nm for the Parylene outer layer, were measured. The wettability for non-polar liquids with a contact angle of 30° was better than for polar liquids, such as water, achieving 87° on the Parylene C surfaces.
本文研究了一种合成聚对二甲苯-金属多层膜的新方法。金属层由甲醇中的金属盐溶液和干燥后等离子体还原处理得到。该过程设计为一锅法合成，与使用电子束溅射工艺相比，所需资源和能量非常少。在用聚对二甲苯C进行还原等离子体处理后获得聚对二甲苯涂层。因此，使用了带有内置等离子体微波发生器的聚对二甲苯涂层设备以确保一锅法合成的特性。该过程在整个金属盐层上提供了厚度在1 - 2 nm范围内的超薄金属盐层以及尺寸为10 - 30 nm的较大金属盐团聚体。通过椭偏测量得到的聚对二甲苯层厚度约为4.5至4.7 µm，通过白光反射测量法测得的厚度为5.7 - 6.3 µm。拉伸强度分析表明其正交拉伸应力抗性约为4500 N。测得金属层的表面粗糙度为4 - 8 nm，聚对二甲苯外层的表面粗糙度为20 - 29 nm。对于非极性液体，其接触角为30°，润湿性优于极性液体，如在聚对二甲苯C表面水的接触角达到87°。
