Dong Litong, Zhang Ziang, Wang Lu, Weng Zhankun, Ouyang Mingzhao, Fu Yuegang, Wang Jiake, Li Dayou, Wang Zuobin
Appl Opt. 2019 Aug 20;58(24):6706-6712. doi: 10.1364/AO.58.006706.
Multifunctional antireflective coatings have practical applications as important optical components in many fields, particularly for optical devices and imaging systems. However, a good antireflection application in the visible region is often unsatisfactory for mid-infrared devices, and the difficulty in obtaining multiple capabilities simultaneously is one of the main factors limiting their applications. In this work, hierarchical moth-eye structures with superhydrophobicity were fabricated via inductively coupled plasma reactive ion etching (ICP-RIE) using nanodisk-array masks, which were formed by three-beam laser interference lithography (LIL), for improving the ultra-broadband optical properties. The uniform antireflection efficiency, which was close to 1% reflectivity covering over the visible and mid-infrared wavelength range, was exhibited by the moth-eye structures with high-quality pillar arrays. Additionally, irregular nanostructures were tailored onto the top of the pillars to generate hierarchical moth-eye structures for simultaneously obtaining both the superhydrophobic and anticorrosive properties. The fabricated antireflective structures, with the features of self-cleaning and durability, have the advantage of being for long-term use in harsh environments.
多功能减反射涂层作为许多领域重要的光学元件具有实际应用价值，特别是在光学器件和成像系统中。然而，在可见光区域良好的减反射应用对于中红外器件而言往往并不理想，同时获得多种功能的困难是限制其应用的主要因素之一。在这项工作中，通过电感耦合等离子体反应离子刻蚀（ICP-RIE），使用由三束激光干涉光刻（LIL）形成的纳米盘阵列掩膜，制备了具有超疏水性的分级蛾眼结构，以改善超宽带光学性能。具有高质量柱状阵列的蛾眼结构展现出均匀的减反射效率，在可见光和中红外波长范围内反射率接近1%。此外，在柱体顶部定制不规则纳米结构以生成分级蛾眼结构，从而同时获得超疏水和抗腐蚀性能。所制备的减反射结构具有自清洁和耐久性的特点，有利于在恶劣环境中长期使用。
