Tang Lei, Teng Changjiu, Luo Yuting, Khan Usman, Pan Haiyang, Cai Zhengyang, Zhao Yue, Liu Bilu, Cheng Hui-Ming
Shenzhen Geim Graphene Center, Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China.
Shenzhen Institute for Quantum Science and Engineering and Department of Physics, Southern University of Science and Technology, Shenzhen 518055, China.
Research (Wash D C). 2019 Mar 19;2019:2763704. doi: 10.34133/2019/2763704. eCollection 2019.
The controllable growth of two-dimensional (2D) semiconductors with large domain sizes and high quality is much needed in order to reduce the detrimental effect of grain boundaries on device performance but has proven to be challenging. Here, we analyze the precursor concentration on the substrate surface which significantly influences nucleation density in a vapor deposition growth process and design a confined micro-reactor to grow 2D InSe with large domain sizes and high quality. The uniqueness of this confined micro-reactor is that its size is ~10-10 times smaller than that of a conventional reactor. Such a remarkably small reactor causes a very low precursor concentration on the substrate surface, which reduces nucleation density and leads to the growth of 2D InSe grains with sizes larger than 200 m. Our experimental results show large domain sizes of the 2D InSe with high crystallinity. The flexible broadband photodetectors based on the as-grown InSe show rise and decay times of 140 ms and 25 ms, efficient response (5.6 A/W), excellent detectivity (7×10 Jones), high external quantum efficiency (251%), good flexibility, and high stability. This study, in principle, provides an effective strategy for the controllable growth of high quality 2D materials with few grain boundaries.
为了减少晶界对器件性能的不利影响,迫切需要可控地生长具有大尺寸和高质量的二维(2D)半导体,但事实证明这具有挑战性。在这里,我们分析了衬底表面上的前驱体浓度,其在气相沉积生长过程中会显著影响成核密度,并设计了一种受限微反应器来生长具有大尺寸和高质量的二维InSe。这种受限微反应器的独特之处在于其尺寸比传统反应器小约10-10倍。如此小的反应器会使衬底表面的前驱体浓度非常低,这降低了成核密度并导致尺寸大于200μm的二维InSe晶粒生长。我们的实验结果表明二维InSe具有大尺寸且结晶度高。基于所生长的InSe的柔性宽带光电探测器的上升和衰减时间分别为140ms和25ms,具有高效响应(5.6A/W)、出色的探测率(7×10琼斯)高外量子效率(251%)、良好的柔韧性和高稳定性。原则上,这项研究为可控生长具有少量晶界的高质量二维材料提供了一种有效策略。