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二维材料及其异质结构的化学气相沉积生长与应用

Chemical Vapor Deposition Growth and Applications of Two-Dimensional Materials and Their Heterostructures.

作者信息

Cai Zhengyang, Liu Bilu, Zou Xiaolong, Cheng Hui-Ming

机构信息

Shenzhen Geim Graphene Center (SGC), Tsinghua-Berkeley Shenzhen Institute (TBSI) , Tsinghua University , Shenzhen , Guangdong 518055 , People's Republic of China.

Shenyang National Laboratory for Materials Sciences, Institute of Metal Research , Chinese Academy of Sciences , Shenyang , Liaoning 110016 , People's Republic of China.

出版信息

Chem Rev. 2018 Jul 11;118(13):6091-6133. doi: 10.1021/acs.chemrev.7b00536. Epub 2018 Jan 31.

Abstract

Two-dimensional (2D) materials have attracted increasing research interest because of the abundant choice of materials with diverse and tunable electronic, optical, and chemical properties. Moreover, 2D material based heterostructures combining several individual 2D materials provide unique platforms to create an almost infinite number of materials and show exotic physical phenomena as well as new properties and applications. To achieve these high expectations, methods for the scalable preparation of 2D materials and 2D heterostructures of high quality and low cost must be developed. Chemical vapor deposition (CVD) is a powerful method which may meet the above requirements, and has been extensively used to grow 2D materials and their heterostructures in recent years, despite several challenges remaining. In this review of the challenges in the CVD growth of 2D materials, we highlight recent advances in the controlled growth of single crystal 2D materials, with an emphasis on semiconducting transition metal dichalcogenides. We provide insight into the growth mechanisms of single crystal 2D domains and the key technologies used to realize wafer-scale growth of continuous and homogeneous 2D films which are important for practical applications. Meanwhile, strategies to design and grow various kinds of 2D material based heterostructures are thoroughly discussed. The applications of CVD-grown 2D materials and their heterostructures in electronics, optoelectronics, sensors, flexible devices, and electrocatalysis are also discussed. Finally, we suggest solutions to these challenges and ideas concerning future developments in this emerging field.

摘要

二维(2D)材料因其具有丰富多样且可调控的电子、光学和化学性质,吸引了越来越多的研究兴趣。此外,基于二维材料的异质结构由几种单独的二维材料组合而成,为创造几乎无限数量的材料提供了独特的平台,并展现出奇异的物理现象以及新的性质和应用。为了实现这些高期望,必须开发出可扩展制备高质量、低成本二维材料和二维异质结构的方法。化学气相沉积(CVD)是一种可能满足上述要求的强大方法,尽管仍存在一些挑战,但近年来已被广泛用于生长二维材料及其异质结构。在这篇关于二维材料CVD生长挑战的综述中,我们重点介绍了单晶二维材料可控生长的最新进展,尤其侧重于半导体过渡金属二硫属化物。我们深入探讨了单晶二维畴的生长机制以及用于实现连续且均匀的二维薄膜晶圆级生长的关键技术,这些对于实际应用非常重要。同时,还全面讨论了设计和生长各种基于二维材料的异质结构的策略。此外,还讨论了CVD生长的二维材料及其异质结构在电子学、光电子学、传感器、柔性器件和电催化方面的应用。最后,我们针对这些挑战提出了解决方案,并对这一新兴领域的未来发展提出了想法。

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