State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China.
School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences (UCAS), Beijing 100049, China.
Sensors (Basel). 2019 Dec 23;20(1):106. doi: 10.3390/s20010106.
In this work, a high sensitivity micro-thermal conductivity detector (μTCD) with four thermal conductivity cells was proposed. Compared with conventional TCD sensors, the thermal conductivity cell in this work was designed as a streamlined structure; the thermistors were supported by a strong cantilever beam and suspended in the center of the thermal conductivity cell, which was able to greatly reduce the dead volume of the thermal conductivity cell and the heat loss of the substrate, improving the detection sensitivity. The experimental results demonstrated that the μTCD shows good stability and high sensitivity, which could rapidly detect light gases with a detection limit of 10 ppm and a quantitative repeatability of less than 1.1%.
在这项工作中，提出了一种具有四个热导率池的高灵敏度微热导率检测器 (μTCD)。与传统的 TCD 传感器相比，本工作中的热导率池设计为流线型结构；热敏电阻由坚固的悬臂梁支撑，并悬浮在热导率池的中心，这能够大大减小热导率池的死体积和衬底的热损失，从而提高检测灵敏度。实验结果表明，μTCD 具有良好的稳定性和高灵敏度，能够快速检测低至 10ppm 的轻气体，定量重复性小于 1.1%。
