新型室温表面光电压气体传感器器件的 NO 气敏特性研究。

Studies of NO Gas-Sensing Characteristics of a Novel Room-Temperature Surface-Photovoltage Gas Sensor Device.

机构信息

Silesian University of Technology, Faculty of Automatic Control, Electronics and Computer Science, Department of Cybernetics, Nanotechnology and Data Processing, 44-100 Gliwice, Poland.

出版信息

Sensors (Basel). 2020 Jan 11;20(2):408. doi: 10.3390/s20020408.

DOI:10.3390/s20020408

PMID:31940752

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7013706/

Abstract

In this work the characteristics of a novel type of room temperature NO gas sensor device based on the surface photovoltage effect are described. It was shown that for our SPV gas sensor device, using porous sputtered ZnO nanostructured thin films as the active gas sensing electrode material, the basic gas sensor characteristics in a toxic NO gas atmosphere are strongly dependent on the target NO gas flow rate. Moreover, it was also confirmed that our SPV gas sensor device is able to detect the lowest NO relative concentration at the level of 125 ppb, with respect to the commonly assumed signal-to-noise (S/N) ratio, as for the commercial devices.

摘要

本文描述了一种基于表面光电压效应的新型室温 NO 气体传感器装置的特性。结果表明，对于我们的 SPV 气体传感器装置，使用多孔溅射 ZnO 纳米结构薄膜作为活性气体传感电极材料，在有毒 NO 气体环境中，基本气体传感器特性强烈依赖于目标 NO 气体流速。此外，还证实了我们的 SPV 气体传感器装置能够以相对于商业设备通常假设的信噪比 (S/N) 水平，检测到低至 125ppb 的最低相对 NO 浓度。