Fang Xiaoguo, Zheng Changxiong, Yin Zhen, Wang Zhenming, Wang Jiawei, Liu Jianxun, Luo Dan, Liu Yan Jun
Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China.
Harbin Institute of Technology, Harbin 150001, China.
ACS Appl Mater Interfaces. 2020 Mar 11;12(10):12345-12352. doi: 10.1021/acsami.9b22932. Epub 2020 Feb 26.
We developed an improved self-assembly method to obtain a large-area, high-quality templated monolayer mask using the polystyrene spheres. On the basis of the templated mask, hierarchically ordered Si metastructures with different nanosteps are fabricated using cyclic inductively coupled plasma etching technique. By evaporating a thin gold capping layer on these Si metastructures, their optical properties are comparatively studied using the surface-enhanced Raman scattering spectroscopy. Our proposed technique is highly promising for fabricating a variety of periodic three-dimensional hierarchically ordered metastructures, which could be further utilized for applications in SERS-based biosensors, optical absorbers, metamaterial/metasurface devices, etc.
我们开发了一种改进的自组装方法，以使用聚苯乙烯球体获得大面积、高质量的模板化单层掩膜。基于该模板化掩膜，利用循环电感耦合等离子体蚀刻技术制造出具有不同纳米台阶的分层有序硅亚结构。通过在这些硅亚结构上蒸发一层薄金覆盖层，使用表面增强拉曼散射光谱对其光学性质进行了比较研究。我们提出的技术在制造各种周期性三维分层有序亚结构方面极具前景，这些亚结构可进一步用于基于表面增强拉曼散射的生物传感器、光吸收器、超材料/超表面器件等应用中。
