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含硅类金刚石薄膜：结构与非线性光学性质

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties.

作者信息

Meškinis Šarūnas, Vasiliauskas Andrius, Andrulevičius Mindaugas, Peckus Domantas, Tamulevičius Sigitas, Viskontas Karolis

机构信息

Institute of Materials Science, Kaunas University of Technology, K. Baršausko St. 59, LT-51423 Kaunas, Lithuania.

JSC Ekspla, Savanorių 237, LT-02300 Vilnius, Lithuania.

出版信息

Materials (Basel). 2020 Feb 23;13(4):1003. doi: 10.3390/ma13041003.

DOI:10.3390/ma13041003
PMID:32102249
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7079637/
Abstract

In the present research diamond-like carbon (DLC) films containing 4-29 at.% of silicon were deposited by reactive magnetron sputtering of carbon target. Study by X-ray photoelectron spectroscopy revealed the presence of Si-C bonds in the films. Nevertheless, a significant amount of Si-O-C and Si-O bonds was present too. The shape of the Raman scattering spectra of all studied diamond-like carbon containing silicon (DLC:Si) films was typical for diamond-like carbon. However, some peculiarities related to silicon doping were found. Studies on the dependence of DLC:Si of the optical transmittance spectra on the Si atomic concentration have shown that doping by silicon affects linear, as well as nonlinear, optical properties of the films. It is shown that the normalized reflectance of DLC:Si films decreased with the increased exciting light fluence. No clear relation between the normalized reflectance and photoexcited charge carrier relaxation time was found. It was suggested that that the normalized reflectance decrease with fluence can be related to nonlinear optical properties of the hydrogenated diamond-like carbon phase in DLC:Si film.

摘要

在本研究中，通过对碳靶进行反应磁控溅射，沉积了含4 - 29原子百分比硅的类金刚石碳（DLC）薄膜。X射线光电子能谱研究表明薄膜中存在Si - C键。然而，也存在大量的Si - O - C键和Si - O键。所有研究的含硅类金刚石碳（DLC:Si）薄膜的拉曼散射光谱形状对于类金刚石碳来说是典型的。然而，发现了一些与硅掺杂有关的特性。对DLC:Si的光学透射光谱随硅原子浓度变化的研究表明，硅掺杂会影响薄膜的线性和非线性光学性质。结果表明，DLC:Si薄膜的归一化反射率随激发光通量的增加而降低。未发现归一化反射率与光激发电荷载流子弛豫时间之间存在明确关系。有人提出，归一化反射率随通量降低可能与DLC:Si薄膜中氢化类金刚石碳相的非线性光学性质有关。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/32196ba57a59/materials-13-01003-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/8cdca3a0ce70/materials-13-01003-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/220f7427a4be/materials-13-01003-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/cd32d4e6e4cf/materials-13-01003-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/d3fb2fb444c9/materials-13-01003-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/1641314effc1/materials-13-01003-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/4e176c3ef6ad/materials-13-01003-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/0f388958006f/materials-13-01003-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/85383e2bbb9e/materials-13-01003-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/c14f9da9fd1c/materials-13-01003-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/32196ba57a59/materials-13-01003-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/8cdca3a0ce70/materials-13-01003-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/85b348840a45/materials-13-01003-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/d9c43d620475/materials-13-01003-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/70e8d9cf58e7/materials-13-01003-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/9d7bf05c7497/materials-13-01003-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/220f7427a4be/materials-13-01003-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/cd32d4e6e4cf/materials-13-01003-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/d3fb2fb444c9/materials-13-01003-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/1641314effc1/materials-13-01003-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/4e176c3ef6ad/materials-13-01003-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/0f388958006f/materials-13-01003-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/85383e2bbb9e/materials-13-01003-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/c14f9da9fd1c/materials-13-01003-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/c38c/7079637/32196ba57a59/materials-13-01003-g014.jpg

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