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基于磁流变抛光技术的氮化硅陶瓷球研磨加工

Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish.

作者信息

Xiao Xiao-Lan, Li Guang-Xian, Mei Hai-Juan, Yan Qiu-Sheng, Lin Hua-Tay, Zhang Feng-Lin

机构信息

School of Mechanical and Electrical Engineering, Guangdong University of Technology, Guangzhou 510006, China.

School of Engineering, RMIT University, Melbourne, VIC 3000, Australia.

出版信息

Micromachines (Basel). 2020 Mar 14;11(3):304. doi: 10.3390/mi11030304.

Abstract

In this study, a novel finishing method, entitled clustered magnetorheological finish (CMRF), was proposed to improve surface finish of the silicon nitride ( Si 3 N 4 ) balls with ultra fine precision. The effects of different polishing parameters including rotation speeds, eccentricities and the machining gaps on surface finish of Si 3 N 4 balls were investigated by analyzing the roughness, sphericity and the micro morphology of the machined surface. The experimental results showed that the polishing parameters significantly influenced the surface finish. The best surface finish was obtained by using the polishing parameters: the machining gap of 0.8 mm, the eccentricity of 10 mm and the rotation ratio of 3/4. To further investigate the influence of the polishing parameters on the surface finish, an analytical model was also developed to analyze the kinematics of the ceramic ball during CMRF process. The resulting surface finish, as a function of different polishing parameters employed, was evaluated by analyzing the visualized finishing trace and the distribution of the contact points. The simulative results showed that the distribution and trace of the contact points changed with different polishing parameters, which was in accordance with the results of experiments.

摘要

在本研究中,提出了一种名为聚类磁流变光整加工(CMRF)的新型光整加工方法,以实现超精细精度的氮化硅(Si₃N₄)球的表面光整。通过分析加工表面的粗糙度、球度和微观形貌,研究了不同抛光参数(包括转速、偏心距和加工间隙)对Si₃N₄球表面光整的影响。实验结果表明,抛光参数对表面光整有显著影响。使用加工间隙为0.8 mm、偏心距为10 mm和转速比为3/4的抛光参数可获得最佳表面光整效果。为了进一步研究抛光参数对表面光整的影响,还建立了一个分析模型来分析CMRF过程中陶瓷球的运动学。通过分析可视化的光整轨迹和接触点分布,评估了作为不同抛光参数函数的最终表面光整效果。模拟结果表明,接触点的分布和轨迹随不同的抛光参数而变化,这与实验结果一致。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3549/7143117/ce04b471acc1/micromachines-11-00304-g001.jpg

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