Wang Bo, Shi Feng, Tie Guipeng, Zhang Wanli, Song Ci, Tian Ye, Shen Yongxiang
College of Intelligence Science and Technology, National University of Defense Technology, 109 Deya Road, Changsha 410073, China.
Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China.
Micromachines (Basel). 2022 Apr 29;13(5):697. doi: 10.3390/mi13050697.
In the high-power laser system, the mid-spatial frequency error of the surface of the high-power laser component will affect the normal operation of the high-power laser system. In order to improve the mid-spatial frequency error of the high-power laser component after magnetorheological finishing, the causes and influencing factors of the ribbon fluctuation in magnetorheological finishing are studied, and the influence of different ribbon fluctuation on the mid-spatial frequency error of the surface is studied. Firstly, the influence of different ribbon fluctuations on the mid-spatial frequency error of the machined surface is simulated by a computer. Secondly, the magnetic field in the circumferential direction of the polishing wheel, the fluctuation amount and frequency of the magnetorheological polishing ribbon are measured, and then the causes of the fluctuation of the magnetorheological polishing ribbon are analyzed. Moreover, through the principle of a single variable, the influence of process parameters on the fluctuation of magnetorheological polishing ribbon is explored. Finally, the fused silica component is scanned uniformly under the process parameters of magnetorheological polishing ribbon fluctuation of 40 μm, 80 μm, 150 μm, and 200 μm. The experimental results show that the greater the ribbon fluctuation, the greater the surface mid-spatial frequency error of the component, and the ribbon fluctuation is approximately linear with the RMS of the PSD2 in the mid-spatial frequency band on the surface of the component. Therefore, the fluctuation of the ribbon can be controlled by controlling the magnetorheological processing parameters, and the mid-spatial frequency band error on the surface of the high-power laser component can be significantly reduced by optimizing process parameters after magnetorheological finishing.
在高功率激光系统中,高功率激光元件表面的中空间频率误差会影响高功率激光系统的正常运行。为了改善磁流变抛光后高功率激光元件的中空间频率误差,研究了磁流变抛光中磨带波动的成因及影响因素,并研究了不同磨带波动对表面中空间频率误差的影响。首先,通过计算机模拟不同磨带波动对加工表面中空间频率误差的影响。其次,测量抛光轮圆周方向的磁场、磁流变抛光磨带的波动量和频率,进而分析磁流变抛光磨带波动的成因。此外,通过单变量原理,探究工艺参数对磁流变抛光磨带波动的影响。最后,在磁流变抛光磨带波动为40μm、80μm、150μm和200μm的工艺参数下对熔融石英元件进行均匀扫描。实验结果表明,磨带波动越大,元件表面的中空间频率误差越大,磨带波动与元件表面中空间频率带内PSD2的均方根近似呈线性关系。因此,通过控制磁流变加工参数可以控制磨带波动,通过优化磁流变抛光后的工艺参数可以显著降低高功率激光元件表面的中空间频率带误差。