Miao Jinshui, Liu Xiwen, Jo Kiyoung, He Kang, Saxena Ravindra, Song Baokun, Zhang Huiqin, He Jiale, Han Myung-Geun, Hu Weida, Jariwala Deep
Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States.
Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States.
Nano Lett. 2020 Apr 8;20(4):2907-2915. doi: 10.1021/acs.nanolett.0c00741. Epub 2020 Mar 27.
van der Waals (vdW) semiconductors are attractive for highly scaled devices and heterogeneous integration as they can be isolated into self-passivated, two-dimensional (2D) layers that enable superior electrostatic control. These attributes have led to numerous demonstrations of field-effect devices ranging from transistors to triodes. By exploiting the controlled, substitutional doping schemes in covalently bonded, three-dimensional (3D) semiconductors and the passivated surfaces of 2D semiconductors, one can construct devices that can exceed performance metrics of "all-2D" vdW heterojunctions. Here, we demonstrate 2D/3D semiconductor heterojunctions using MoS as the prototypical 2D semiconductor laid upon Si and GaN as the 3D semiconductor layers. By tuning the Fermi levels in MoS, we demonstrate devices that concurrently exhibit over 7 orders of magnitude modulation in rectification ratios and conductance. Our results further suggest that the interface quality does not necessarily affect Fermi level tuning at the junction, opening up possibilities for novel 2D/3D heterojunction device architectures.
范德华(vdW)半导体对于高度缩放的器件和异质集成具有吸引力,因为它们可以被分离成自钝化的二维(2D)层,从而实现卓越的静电控制。这些特性已促成了从晶体管到三极管等众多场效应器件的演示。通过利用共价键合的三维(3D)半导体中的可控替代掺杂方案以及二维半导体的钝化表面,人们可以构建出性能超越“全二维”范德华异质结的器件。在此,我们展示了以MoS作为典型二维半导体、以Si和GaN作为三维半导体层的二维/三维半导体异质结。通过调节MoS中的费米能级,我们展示了整流比和电导率同时呈现超过7个数量级调制的器件。我们的结果进一步表明,界面质量不一定会影响结处的费米能级调节,为新型二维/三维异质结器件架构开辟了可能性。