Ma Haiguang, Xu Jun, Chen Kunji, Yu Linwei
National Laboratory of Solid State Microstructures/School of Electronics Science and Engineering/Collaborative Innovation Centre of Advanced Microstructures, Nanjing University, Nanjing, 210093, P. R. China.
Nanoscale. 2020 Apr 30;12(16):8949-8957. doi: 10.1039/d0nr01283a.
Ultralow temperature growth of silicon nanowires (SiNWs) directly upon cheap plastics is highly desirable for building high performance soft logics and sensors based on mature Si technology. In this work, a low temperature growth of SiNWs at only 70 °C has been demonstrated for the first time, upon polyethylene terephthalate plastics, by using gallium-indium (GaIn) alloy droplets that consume an amorphous Si (a-Si) layer as the precursor. The GaIn alloy droplets enable a beneficial synergetic effect that helps not only to reduce the melting temperature, but also to install a protective Gibbs adsorption layer of In atoms, which are critical to stabilize the rolling catalyst droplet, against otherwise rapid diffusion loss of Ga into the a-Si matrix. Ultra-long SiNWs can be batch-produced with a precise location and preferred elastic geometry, which paves the way for large scale integration. At <70 °C, a transition from rolling to sprawling dynamics is observed by in situ scanning electron microscopy, caused by reduced diffusion transport and rapid formation of discrete nuclei in the alloy droplet, which provides the basis for continuous growth of SiNWs. This unique capability and critical new understanding open the way for integrating high quality c-Si electronics directly over flexible, lightweight and extremely low cost plastics.
直接在廉价塑料上进行硅纳米线(SiNWs)的超低温生长,对于基于成熟硅技术构建高性能软逻辑器件和传感器而言是非常理想的。在这项工作中,首次展示了在聚对苯二甲酸乙二酯塑料上仅在70°C的低温下生长SiNWs,方法是使用消耗非晶硅(a-Si)层作为前驱体的镓铟(GaIn)合金液滴。GaIn合金液滴产生了有益的协同效应,这不仅有助于降低熔化温度,还能形成一层由铟原子组成的保护性吉布斯吸附层,这对于稳定滚动的催化剂液滴至关重要,否则镓会迅速扩散到a-Si基体中而损失。超长SiNWs可以批量生产,具有精确的位置和理想的弹性几何形状,这为大规模集成铺平了道路。在<70°C时,通过原位扫描电子显微镜观察到从滚动到蔓延动力学的转变,这是由合金液滴中扩散传输减少和离散核的快速形成引起的,这为SiNWs的持续生长提供了基础。这种独特的能力和关键的新认识为直接在柔性、轻质且成本极低的塑料上集成高质量的c-Si电子器件开辟了道路。