使用光学无线集成电路的微观传感器。
Microscopic sensors using optical wireless integrated circuits.
机构信息
Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, NY 14853.
Applied and Engineering Physics, Cornell University, Ithaca, NY 14853.
出版信息
Proc Natl Acad Sci U S A. 2020 Apr 28;117(17):9173-9179. doi: 10.1073/pnas.1919677117. Epub 2020 Apr 17.
Abstract
We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic microlight emitting diodes (LEDs) into a 100-μm-scale package that is powered by and communicates with light. The devices are fabricated, packaged, and released in parallel using photolithographic techniques, resulting in ∼10,000 individual sensors per square inch. To illustrate their use, we show proof-of-concept measurements recording voltage, temperature, pressure, and conductivity in a variety of environments.
摘要
我们提出了一个平台，用于并行生产独立的、无绳的电子传感器，这些传感器真正是微观的，即小于肉眼的分辨率。该平台将硅电子器件和无机微发光二极管（LED）异质集成到一个 100-μm 级的封装中，该封装由光供电并与光通信。这些器件使用光刻技术进行并行制造、封装和释放，每平方英寸可获得约 10000 个独立的传感器。为了说明其用途，我们展示了在各种环境中记录电压、温度、压力和电导率的概念验证测量。
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