Measurement of In-Plane Motions in MEMS.

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作者信息

Arabi Mohamed, Gopanchuk Mary, Abdel-Rahman Eihab, Yavuz Mustafa

机构信息

Department of Systems Design Engineering, University of Waterloo, Waterloo N2L 3G1, ON, Canada.

Design & Engineering, Polytechnic University of Milan, Piazza Leonardo Da Vinci, 32, 20133 Milano MI, Italy.

出版信息

Sensors (Basel). 2020 Jun 25;20(12):3594. doi: 10.3390/s20123594.

DOI:10.3390/s20123594

PMID:32630484

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7349389/

Abstract

We report a technique to measure in-plane and out-of-plane motions of MEMS using typical out-of-plane (single-axis) Laser Doppler Vibrometers (LDVs). The efficacy of the technique is demonstrated by evaluating the in-plane and out-of-plane modal response and frequency response of an interdigitated comb-drive actuator. We also investigate the validity of observing planar modes of vibration outside their dominant plane of motion and find that it leads to erroneous results. Planar modes must be evaluated in their plan of motion.

摘要