Nam Vu Binh, Giang Trinh Thi, Koo Sangmo, Rho Junsuk, Lee Daeho
Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, 37673, South Korea.
Laser and Thermal Engineering Lab, Department of Mechanical Engineering, Gachon University, Seongnam, 13120, South Korea.
Nano Converg. 2020 Jul 6;7(1):23. doi: 10.1186/s40580-020-00232-9.
As an alternative approach to the conventional deposition and photolithographic processes, the laser digital patterning (LDP) process, which is also known as the laser direct writing process, has attracted considerable attention because it is a non-photolithographic, non-vacuum, on-demand, and cost-effective electrode fabrication route that can be applied to various substrates, including heat-sensitive flexible substrates. The LDP process was initially developed using noble metal nanoparticles (NPs) such as Au and Ag because such materials are free from oxidation even in a nanosize configuration. Thus, the NPs must be fused together to form continuous conductive structures upon laser irradiation. However, common metals are easily oxidized at the nanoscale and exist in oxidized forms owing to the extremely large surface-to-volume ratio of NPs. Therefore, to fabricate conductive electrodes using common metal NPs via the LDP process, laser irradiation should be used to sinter the NPs and simultaneously induce additional photochemical reactions, such as reduction, and defect structure modification to increase the conductivity of the electrodes. This review summarizes recent studies on the LDP process in which metal oxide NPs, such as ITO, ZnO, CuO, and NiO, were exclusively utilized for fabricating conductive electrodes. The outlook of the LDP process for these materials is also discussed as a method that can be used together with or as a replacement for conventional ones to produce next-generation transparent conductors, sensors, and electronics.
作为传统沉积和光刻工艺的一种替代方法,激光数字图案化(LDP)工艺,也被称为激光直写工艺,因其是一种非光刻、非真空、按需且具有成本效益的电极制造途径,可应用于包括热敏柔性基板在内的各种基板,而备受关注。LDP工艺最初是使用诸如金和银等贵金属纳米颗粒(NPs)开发的,因为即使在纳米尺寸配置下,这些材料也不会氧化。因此,在激光照射下,纳米颗粒必须融合在一起以形成连续的导电结构。然而,常见金属在纳米尺度下很容易被氧化,并且由于纳米颗粒极大的表面积与体积比而以氧化形式存在。因此,要通过LDP工艺使用常见金属纳米颗粒制造导电电极,应使用激光照射来烧结纳米颗粒,同时引发额外的光化学反应,如还原反应以及缺陷结构改性,以提高电极的导电性。本综述总结了近期关于LDP工艺的研究,其中专门利用了诸如氧化铟锡(ITO)、氧化锌(ZnO)、氧化铜(CuO)和氧化镍(NiO)等金属氧化物纳米颗粒来制造导电电极。还讨论了LDP工艺对于这些材料的前景,作为一种可与传统工艺一起使用或替代传统工艺以生产下一代透明导体、传感器和电子产品的方法。