Parameswaran Chithra, Gupta Dipti
Plastic Electronics and Energy Laboratory, Department of Metallurgical Engineering and Materials Science, Indian Institute of Technology Bombay, Mumbai, 400076, India.
Nano Converg. 2019 Sep 9;6(1):28. doi: 10.1186/s40580-019-0198-x.
Sensors are becoming more demanding in all spheres of human activities for their advancement in terms of fabrication and cost. Several methods of fabrication and configurations exist which provide them myriad of applications. However, the advantage of fabrication for sensors lies with bulk fabrication and processing techniques. Exhaustive study for process advancement towards miniaturization from the advent of MEMS technology has been going on and progressing at high pace and has reached a highly advanced level wherein batch production and low cost alternatives provide a competitive performance. A look back to this advancement and thus understanding the route further is essential which is the core of this review in light of nanomaterials and printed technology based sensors. A subjective appraisal of these developments in sensor architecture from the advent of MEMS technology converging present date novel materials and process technologies through this article help us understand the path further.
在人类活动的各个领域,传感器在制造工艺和成本方面的进步使其需求不断增加。存在多种制造方法和配置,为传感器提供了无数应用。然而,传感器制造的优势在于批量制造和加工技术。自微机电系统(MEMS)技术问世以来,针对向小型化发展的工艺改进进行了详尽研究,且进展迅速,已达到高度先进的水平,其中批量生产和低成本替代方案具备具有竞争力的性能。回顾这一进展并进而了解未来的发展路径至关重要,鉴于基于纳米材料和印刷技术的传感器,这正是本综述的核心内容。通过本文对从MEMS技术出现到融合当今新型材料和工艺技术的传感器架构发展进行主观评估,有助于我们进一步了解发展路径。