Lee Wonseok, Chae Hyoungseok, Oh Dong Kyo, Lee Minyoung, Chun Hyunsoo, Yeon Gyubeom, Park Jaewon, Kim Joohoon, Youn Hongseok, Rho Junsuk, Ok Jong G
Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul, 01811 Republic of Korea.
Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, 37673 Republic of Korea.
Microsyst Nanoeng. 2021 Sep 27;7:74. doi: 10.1038/s41378-021-00307-5. eCollection 2021.
A facile and scalable lithography-free fabrication technique, named solution-processable electrode-material embedding in dynamically inscribed nanopatterns (SPEEDIN), is developed to produce highly durable electronics. SPEEDIN uniquely utilizes a single continuous flow-line manufacturing process comprised of dynamic nanoinscribing and metal nanoparticle solution coating with selective embedding. Nano- and/or micro-trenches are inscribed into arbitrary polymers, and then an Ag nanoparticle solution is dispersed, soft-baked, doctor-bladed, and hard-baked to embed Ag micro- and nanowire structures into the trenches. Compared to lithographically embossed metal structures, the embedded SPEEDIN architectures can achieve higher durability with comparable optical and electrical properties and are robust and power-efficient even under extreme stresses such as scratching and bending. As one tangible application of SPEEDIN, we demonstrate a flexible metal electrode that can operate at 5 V at temperatures up to 300 °C even under the influence of harsh external stimuli. SPEEDIN can be applied to the scalable fabrication of diverse flexible devices that are reliable for heavy-duty operation in harsh environments involving high temperatures, mechanical deformations, and chemical hazards.
一种名为“动态刻写纳米图案中溶液可加工电极材料嵌入法(SPEEDIN)”的简便且可扩展的无光刻制造技术被开发出来,用于生产高度耐用的电子产品。SPEEDIN独特地采用了一种单一的连续流水线制造工艺,该工艺由动态纳米刻写和具有选择性嵌入的金属纳米颗粒溶液涂层组成。纳米和/或微沟槽被刻写在任意聚合物中,然后将银纳米颗粒溶液分散、软烘焙、刮涂并硬烘焙,以将银微线和纳米线结构嵌入沟槽中。与光刻压印的金属结构相比,嵌入的SPEEDIN架构在具有可比的光学和电学性能的情况下能够实现更高的耐久性,并且即使在诸如刮擦和弯曲等极端应力下也坚固且节能。作为SPEEDIN的一个实际应用,我们展示了一种柔性金属电极,即使在恶劣的外部刺激影响下,在高达300°C的温度下也能在5V电压下工作。SPEEDIN可应用于各种柔性器件的可扩展制造,这些器件在涉及高温、机械变形和化学危害的恶劣环境中进行重型操作时是可靠的。