Integrated Electronics and Biointerfaces Laboratory, Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, CA 92093, USA.
Sensors (Basel). 2020 Jul 11;20(14):3872. doi: 10.3390/s20143872.
Piezoelectric devices transduce mechanical energy to electrical energy by elastic deformation, which distorts local dipoles in crystalline materials. Amongst electromechanical sensors, piezoelectric devices are advantageous because of their scalability, light weight, low power consumption, and readily built-in amplification and ability for multiplexing, which are essential for wearables, medical devices, and robotics. This paper reviews recent progress in active piezoelectric devices. We classify these piezoelectric devices according to the material dimensionality and present physics-based device models to describe and quantify the piezoelectric response for one-dimensional nanowires, emerging two-dimensional materials, and three-dimensional thin films. Different transduction mechanisms and state-of-the-art devices for each type of material are reviewed. Perspectives on the future applications of active piezoelectric devices are discussed.
压电设备通过弹性变形将机械能转换为电能,从而使晶态材料中的局部偶极子发生变形。在机电传感器中,压电设备具有可扩展性、重量轻、功耗低以及易于内置放大和多路复用等优势,这些优势对于可穿戴设备、医疗设备和机器人技术而言至关重要。本文综述了有源压电设备的最新进展。我们根据材料的维度对这些压电设备进行分类,并提出基于物理的器件模型,以描述和量化一维纳米线、新兴二维材料和三维薄膜的压电响应。综述了每种材料的不同转换机制和最新器件。讨论了有源压电设备的未来应用前景。