Department of Mechanical Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama, 240-8501, Japan.
Graduate School of System Integration, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama, 240-8501, Japan.
Sci Rep. 2020 Jul 29;10(1):12666. doi: 10.1038/s41598-020-69689-2.
Stretchable physical sensors are crucial for the development of advanced electrical systems, particularly wearable devices and soft robotics. Currently available stretchable sensors that detect both pressure and strain are based on piezoelectric, piezoresistive, or piezocapacitive effects. The range of pressure sensing is 1-800 kPa with large deformations being within the range of deformations of parts of the human body, such as elbows and knees. However, these devices cannot easily allow simultaneous and independent detection of pressure and strain with sensor arrays at large tensions (> 50%) because strain affects the pressure signal. In this study, we propose a monolithic silicone-based array of pressure and strain sensors that can simultaneously and independently detect the in-plane biaxial tensile deformation and pressure. To realize these functionalities, the deformation of the device structure was optimized using a hetero-silicone substrate made of two types of silicone with different hardness characteristics and porous silicone bodies. In addition, the resistances of the sensors were controlled by adjusting a mixture based on carbon nanoparticles to improve the sensitivity and independence between the pressure and strain sensors. These concepts demonstrate the potential of this approach and its compatibility with the current architectures of stretchable physical sensors.
可拉伸物理传感器对于先进电子系统的发展至关重要，特别是可穿戴设备和软机器人。目前可用的同时检测压力和应变的可拉伸传感器基于压电、压阻或压电容效应。压力感应范围为 1-800kPa，大变形范围在人体部位的变形范围内，如肘部和膝盖。然而，这些设备由于应变会影响压力信号，因此不能在大张力（>50%）下使用传感器阵列轻松地同时且独立地检测压力和应变。在本研究中，我们提出了一种基于单晶硅的压力和应变传感器阵列，可以同时且独立地检测平面双轴拉伸变形和压力。为了实现这些功能，使用由两种硬度特性不同的硅和多孔硅体组成的异质硅衬底优化了设备结构的变形。此外，通过调整基于碳纳米颗粒的混合物来控制传感器的电阻，以提高压力和应变传感器之间的灵敏度和独立性。这些概念展示了这种方法的潜力及其与可拉伸物理传感器当前架构的兼容性。
