Rohdenburg Markus, Fröch Johannes E, Martinović Petra, Lobo Charlene J, Swiderek Petra
Institute for Applied and Physical Chemistry (IAPC), Fachbereich 2 (Chemie/Biologie), University of Bremen, Leobener Str. 5 (NW2), 28359 Bremen, Germany.
School of Mathematical and Physical Sciences, University of Technology Sydney, Ultimo, NSW 2007, Australia.
Micromachines (Basel). 2020 Aug 12;11(8):769. doi: 10.3390/mi11080769.
Ammonia (NH)-assisted purification of deposits fabricated by focused electron beam-induced deposition (FEBID) has recently been proven successful for the removal of halide contaminations. Herein, we demonstrate the impact of combined NH and electron processing on FEBID deposits containing hydrocarbon contaminations that stem from anionic cyclopentadienyl-type ligands. For this purpose, we performed FEBID using bis(ethylcyclopentadienyl)ruthenium(II) as the precursor and subjected the resulting deposits to NH and electron processing, both in an environmental scanning electron microscope (ESEM) and in a surface science study under ultrahigh vacuum (UHV) conditions. The results provide evidence that nitrogen from NH is incorporated into the carbon content of the deposits which results in a covalent nitride material. This approach opens a perspective to combine the promising properties of carbon nitrides with respect to photocatalysis or nanosensing with the unique 3D nanoprinting capabilities of FEBID, enabling access to a novel class of tailored nanodevices.
最近已证明，氨（NH₃）辅助净化聚焦电子束诱导沉积（FEBID）制备的沉积物对于去除卤化物污染物是成功的。在此，我们展示了NH₃和电子处理相结合对含有源自阴离子环戊二烯基型配体的碳氢化合物污染物的FEBID沉积物的影响。为此，我们使用双（乙基环戊二烯基）钌（II）作为前驱体进行FEBID，并在环境扫描电子显微镜（ESEM）以及超高真空（UHV）条件下的表面科学研究中，对所得沉积物进行NH₃和电子处理。结果表明，NH₃中的氮被结合到沉积物的碳含量中，从而形成共价氮化物材料。这种方法为将氮化碳在光催化或纳米传感方面的有前景特性与FEBID独特的3D纳米打印能力相结合开辟了前景，能够制造出一类新型的定制纳米器件。
