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共溅射Ag:Al超薄层对用于硅太阳能电池的透明VO/Ag:Al/AZO空穴选择性电极的影响。

Influence of Co-Sputtered Ag:Al Ultra-Thin Layers in Transparent VO/Ag:Al/AZO Hole-Selective Electrodes for Silicon Solar Cells.

作者信息

Tom Thomas, Ros Eloi, López-Pintó Nicolau, Miguel Asensi José, Andreu Jordi, Bertomeu Joan, Puigdollers Joaquim, Voz Cristobal

机构信息

Departament de Física Aplicada, Universitat de Barcelona, 08028 Barcelona, Spain.

Institute of Nanoscience and Nanotechnology (IN2UB), Universitat de Barcelona, 08028 Barcelona, Spain.

出版信息

Materials (Basel). 2020 Oct 31;13(21):4905. doi: 10.3390/ma13214905.

Abstract

As optoelectronic devices continue to improve, control over film thickness has become crucial, especially in applications that require ultra-thin films. A variety of undesired effects may arise depending on the specific growth mechanism of each material, for instance a percolation threshold thickness is present in Volmer-Webber growth of materials such as silver. In this paper, we explore the introduction of aluminum in silver films as a mechanism to grow ultrathin metallic films of high transparency and low sheet resistance, suitable for many optoelectronic applications. Furthermore, we implemented such ultra-thin metallic films in Dielectric/Metal/Dielectric (DMD) structures based on Aluminum-doped Zinc Oxide (AZO) as the dielectric with an ultra-thin silver aluminum (Ag:Al) metallic interlayer. The multilayer structures were deposited by magnetron sputtering, which offers an industrial advantage and superior reliability over thermally evaporated DMDs. Finally, we tested the optimized DMD structures as a front contact for n-type silicon solar cells by introducing a hole-selective vanadium pentoxide (VO) dielectric layer.

摘要

随着光电器件不断改进,对薄膜厚度的控制变得至关重要,尤其是在需要超薄薄膜的应用中。根据每种材料的特定生长机制,可能会出现各种不良影响,例如在银等材料的伏尔默 - 韦伯生长中存在渗流阈值厚度。在本文中,我们探索在银薄膜中引入铝,作为生长具有高透明度和低方块电阻的超薄金属薄膜的一种机制,这种薄膜适用于许多光电子应用。此外,我们基于掺铝氧化锌(AZO)作为电介质,并带有超薄银铝(Ag:Al)金属中间层,在介电/金属/介电(DMD)结构中实现了这种超薄金属薄膜。多层结构通过磁控溅射沉积,与热蒸发的DMD相比,磁控溅射具有工业优势和更高的可靠性。最后,我们通过引入空穴选择性五氧化二钒(VO)介电层,测试了优化后的DMD结构作为n型硅太阳能电池的前接触。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4a7b/7662906/92546d113b31/materials-13-04905-g001.jpg

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