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采用插入银的透明氧化铟锡三层结构制造的高度灵活的触摸屏面板。

Highly flexible touch screen panel fabricated with silver-inserted transparent ITO triple-layer structures.

作者信息

Wu Chia-Ching

机构信息

Department of Applied Science, National Taitung University Taitung Taiwan Republic of China

出版信息

RSC Adv. 2018 Mar 27;8(22):11862-11870. doi: 10.1039/c7ra13550e. eCollection 2018 Mar 26.

DOI:10.1039/c7ra13550e
PMID:35539399
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9079291/
Abstract

A flexible and transparent amorphous-indium tin oxide/silver/crystalline-indium tin oxide (a-ITO/Ag/c-ITO) triple-layer structure was prepared as an electrode for capacitive-type touch screen panels (TSPs). A very thin metal film of silver (Ag) was inserted between two ITO layers, and the triple-layer structures were deposited on a colorless polyimide (CPI) substrate by a sputtering method. It was found that the tunable electrical and optical properties of the a-ITO/Ag/c-ITO triple-layer structures were critically affected by the thickness of the inserted Ag layer. The optimized flexible a-ITO/Ag/c-ITO triple-layer structure has low sheet resistance, high optical transmittance, and low surface roughness. In addition, during the 30 000 bending cycles, the resistance change (Δ) of the flexible a-ITO/Ag/c-ITO triple-layer structure was 4.12%. For environmental reliability, the Δ values of the flexible a-ITO/Ag/c-ITO triple-layer structure were 2.86% and 0.96% at the environmental temperature of 80 °C-50% and -40 °C, respectively. The above results indicate that the a-ITO/Ag/c-ITO triple-layer structure can be utilized to construct a promising TCO electrode. Finally, flexible and foldable capacitive-type TSPs were fabricated with multiple touch points using the a-ITO/Ag/c-ITO triple-layer electrode.

摘要

制备了一种柔性透明的非晶铟锡氧化物/银/晶体铟锡氧化物（a-ITO/Ag/c-ITO）三层结构作为电容式触摸屏面板（TSP）的电极。在两层ITO之间插入一层非常薄的银（Ag）金属薄膜，并通过溅射法将三层结构沉积在无色聚酰亚胺（CPI）基板上。发现插入的Ag层厚度对a-ITO/Ag/c-ITO三层结构的可调电学和光学性能有至关重要的影响。优化后的柔性a-ITO/Ag/c-ITO三层结构具有低方块电阻、高光学透过率和低表面粗糙度。此外，在30000次弯曲循环过程中，柔性a-ITO/Ag/c-ITO三层结构的电阻变化（Δ）为4.12%。在环境可靠性方面，柔性a-ITO/Ag/c-ITO三层结构在80℃-50%和-40℃环境温度下的Δ值分别为2.86%和0.96%。上述结果表明，a-ITO/Ag/c-ITO三层结构可用于构建有前景的透明导电氧化物（TCO）电极。最后，使用a-ITO/Ag/c-ITO三层电极制造了具有多个触摸点的柔性可折叠电容式TSP。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c2a/9079291/48cd049e1c54/c7ra13550e-f10.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c2a/9079291/38d8c7e2a755/c7ra13550e-f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c2a/9079291/48cd049e1c54/c7ra13550e-f10.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c2a/9079291/f7627aa8f838/c7ra13550e-f6.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/4c2a/9079291/4427b92a7c8e/c7ra13550e-f8.jpg
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