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泽尼克相衬全-field 透射 X 射线纳米断层成像术用于 400 微米大小的样品。

Zernike phase-contrast full-field transmission X-ray nanotomography for 400 micrometre-sized samples.

机构信息

Pohang Light Source-II, Pohang Accelerator Laboratory, Jigokro 127, Pohang 36763, South Korea.

Soft Matter Physics Laboratory, Sungkyunkwan University, Suwon 16419, Republic of Korea.

出版信息

J Synchrotron Radiat. 2020 Nov 1;27(Pt 6):1696-1702. doi: 10.1107/S160057752001245X. Epub 2020 Oct 21.

Abstract

Full-field X-ray nanotomography based on a Fresnel zone plate offers a promising and intuitive approach to acquire high-quality phase-contrast images with a spatial resolution of tens of nanometres, and is applicable to both synchrotron radiation and laboratory sources. However, its small field of view (FOV) of tens of micrometres provides limited volume information, which primarily limits its application fields. This work proposes a method for expanding the FOV as the diameter of the objective zone plate, which provides a 400 µm FOV at below 500 nm resolution with Zernike phase contrast. General applications of large-volume nanotomography are demonstrated in integrated circuit microchips and Artemia cysts. This method can be useful for imaging/analyzing industrial and biological samples where bulk properties are important or the sample is difficult to section.

摘要

基于菲涅耳波带片的全视野 X 射线纳米断层摄影术为获取具有数十纳米空间分辨率的高质量相衬图像提供了一种很有前途且直观的方法,适用于同步辐射和实验室光源。然而,其数十微米的小视野(FOV)提供的体积信息有限,这主要限制了其应用领域。本工作提出了一种将 FOV 扩展为物镜波带片直径的方法,该方法在低于 500nm 分辨率下提供了 400μm 的 FOV,并具有泽尼克位相衬度。在集成电路微芯片和卤虫卵囊等大型纳米断层摄影术的通用应用中得到了验证。该方法可用于成像/分析工业和生物样本,这些样本的整体性质很重要或样本难以切片。

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