用于氧化锌涂层光纤传感器的微尺度金刚石保护

Microscale diamond protection for a ZnO coated fiber optic sensor.

作者信息

Kosowska Monika, Listewnik Paulina, Majchrowicz Daria, Rycewicz Michał, Bechelany Mikhael, Fleger Yafit, Chen Mingzhou, Fixler Dror, Dholakia Kishan, Szczerska Małgorzata

机构信息

Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, 11/12 Narutowicza Street, 80-233, Gdańsk, Poland.

SUPA, School of Physics and Astronomy, University of St Andrews, North Haugh, St Andrews, KY16 9SS, UK.

出版信息

Sci Rep. 2020 Nov 5;10(1):19141. doi: 10.1038/s41598-020-76253-5.

DOI:10.1038/s41598-020-76253-5

PMID:33154464

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7645683/

Abstract

Fiber optic sensors are widely used in environmental, biological and chemical sensing. Due to the demanding environmental conditions in which they can be used, there is a risk of damaging the sensor measurement head placed in the measuring field. Sensors using nanolayers deposited upon the fiber structure are particularly vulnerable to damage. A thin film placed on the surface of the fiber end-face can be prone to mechanical damage or deteriorate due to unwanted chemical reactions with the surrounding agent. In this paper, we investigated a sensor structure formed with a Zinc Oxide (ZnO) coating, deposited by Atomic Layer Deposition (ALD) on the tip of a single-mode fiber. A nanocrystalline diamond sheet (NDS) attached over the ZnO is described. The diamond structure was synthesized in a Microwave Plasma Assisted Chemical Vapor Deposition System. The deposition processes of the nanomaterials, the procedure of attaching NDS to the fiber end-face covered with ZnO, and the results of optical measurements are presented.

摘要

光纤传感器广泛应用于环境、生物和化学传感领域。由于其使用环境条件苛刻，放置在测量区域的传感器测量头存在损坏风险。使用沉积在光纤结构上的纳米层的传感器尤其容易受损。置于光纤端面表面的薄膜可能易于受到机械损伤，或者由于与周围介质发生不必要的化学反应而变质。在本文中，我们研究了一种传感器结构，该结构由通过原子层沉积（ALD）沉积在单模光纤尖端的氧化锌（ZnO）涂层形成。描述了附着在ZnO上的纳米晶金刚石片（NDS）。金刚石结构是在微波等离子体辅助化学气相沉积系统中合成的。介绍了纳米材料的沉积过程、将NDS附着到覆盖有ZnO的光纤端面的过程以及光学测量结果。