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利用衬底工程调整二硫化钼晶体管的传输特性和滞后现象。

Tailoring the transfer characteristics and hysteresis in MoS transistors using substrate engineering.

作者信息

Prasad Pragya, Garg Manjari, Chandni U

机构信息

Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012, India.

出版信息

Nanoscale. 2020 Dec 8;12(46):23817-23823. doi: 10.1039/d0nr05861k.

Abstract

We demonstrate a novel form of transfer characteristics in substrate engineered MoS2 field effect transistors. Robust hysteresis with stable threshold voltages and a large gate voltage window is observed, which is suppressed at low temperatures. We analyse the dependence of the device characteristics on gate voltage range, gate stressing and sweep rates. We infer that the hysteresis originates from artificially created charged traps near the MoS2-SiO2 interface. These charge traps act as long range Coulomb scatterers and are screened at high carrier densities. The hysteresis is strongly suppressed in measurements on wafers devoid of the substrate treatment, providing a new extrinsic route to carefully tune the transfer characteristics.

摘要

我们展示了在衬底工程化的二硫化钼场效应晶体管中一种新型的转移特性形式。观察到具有稳定阈值电压和大栅极电压窗口的稳健滞后现象,这种现象在低温下会受到抑制。我们分析了器件特性对栅极电压范围、栅极应力和扫描速率的依赖性。我们推断,滞后现象源于在二硫化钼 - 二氧化硅界面附近人为制造的带电陷阱。这些电荷陷阱充当长程库仑散射体,并在高载流子密度下被屏蔽。在没有进行衬底处理的晶圆测量中,滞后现象得到了强烈抑制,这为精细调节转移特性提供了一条新的非本征途径。

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