微机械加速度计，具有亚微克/√赫兹噪声底：综述。

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review.

机构信息

College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China.

Department of Electrical Engineering and Computer Science, University of Liege, 4000 Liege, Belgium.

出版信息

Sensors (Basel). 2020 Jul 21;20(14):4054. doi: 10.3390/s20144054.

This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.

本文综述了噪声底低于 1μg/√Hz 的微机械加速度计的研究与发展。首先，介绍了微机械加速度计的基本工作原理。然后，分析了降低微机械加速度计噪声底的不同方法。讨论了噪声底低于 1μg/√Hz 的不同类型的微机械加速度计。这类传感器主要可以分为：（i）采用低弹性常数的微机械加速度计；（ii）采用大质量块的微机械加速度计；（iii）采用高品质因数的微机械加速度计；（iv）采用低噪声接口电路的微机械加速度计；（v）采用高灵敏度系数的检测方案的微机械加速度计。最后，讨论和研究了各种微机械加速度计的特点及其发展趋势。