College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China.
Department of Electrical Engineering and Computer Science, University of Liege, 4000 Liege, Belgium.
Sensors (Basel). 2020 Jul 21;20(14):4054. doi: 10.3390/s20144054.
This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.
本文综述了噪声底低于 1μg/√Hz 的微机械加速度计的研究与发展。首先，介绍了微机械加速度计的基本工作原理。然后，分析了降低微机械加速度计噪声底的不同方法。讨论了噪声底低于 1μg/√Hz 的不同类型的微机械加速度计。这类传感器主要可以分为：（i）采用低弹性常数的微机械加速度计；（ii）采用大质量块的微机械加速度计；（iii）采用高品质因数的微机械加速度计；（iv）采用低噪声接口电路的微机械加速度计；（v）采用高灵敏度系数的检测方案的微机械加速度计。最后，讨论和研究了各种微机械加速度计的特点及其发展趋势。
