用于内窥镜光声成像的基于陶瓷锆钛酸铅的压电微机电系统阵列
A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging.
作者信息
Wang Haoran, Chen Zhenfang, Yang Hao, Jiang Huabei, Xie Huikai
机构信息
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611 USA.
MEMS Engineering and Materials Inc., Sunnyvale, CA 94087 USA.
出版信息
J Microelectromech Syst. 2020 Oct;29(5):1038-1043. doi: 10.1109/jmems.2020.3010773. Epub 2020 Jul 28.
Abstract
In this paper, we present the design, fabrication, and characterization of a compact 4 × 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4 m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8 × 1.6 mm with each pMUT element having a diameter of 210 m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array.
摘要
在本文中，我们介绍了一种紧凑型4×4压电微机械超声换能器（pMUT）阵列的设计、制造和特性表征，及其在光声成像中的应用。该pMUT阵列的独特之处在于集成了厚度为4μm的陶瓷PZT，其压电系数明显高于溶胶-凝胶或溅射PZT，且应力更低。所制造的pMUT阵列芯片尺寸小，仅为1.8×1.6mm，每个pMUT元件的直径为210μm。通过电阻抗测量和声传感测试对所制造的器件进行了特性表征。使用所制造的pMUT阵列，还成功地在嵌入铅笔芯的琼脂模型上进行了光声成像演示。
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