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通过纳米压印光刻合成的GaN纳米棒中轴向InGaN/GaN量子阱的应变诱导黄到蓝发射剪裁

Strain-induced yellow to blue emission tailoring of axial InGaN/GaN quantum wells in GaN nanorods synthesized by nanoimprint lithography.

作者信息

Avit Geoffrey, Robin Yoann, Liao Yaqiang, Nan Hu, Pristovsek Markus, Amano Hiroshi

机构信息

IMaSS, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8601, Japan.

CNRS, UMR6602, Institut Pascal, 4 Avenue blaise Pascal, 63178, Aubière, France.

出版信息

Sci Rep. 2021 Mar 24;11(1):6754. doi: 10.1038/s41598-021-86139-9.

Abstract

GaN nanorods (NRds) with axial InGaN/GaN MQWs insertions are synthesized by an original cost-effective and large-scale nanoimprint-lithography process from an InGaN/GaN MQWs layer grown on c-sapphire substrates. By design, such NRds exhibit a single emission due to the c-axis MQWs. A systematic study of the emission of the NRds by time-resolved luminescence (TR-PL) and power dependence PL shows a diameter-controlled luminescence without significant degradation of the recombination rate thanks to the diameter-controlled strain tuning and QSCE. A blueshift up to 0.26 eV from 2.28 to 2.54 eV (543 nm to 488 nm) is observed for 3.2 nm thick InGaN/GaN QWs with an In composition of 19% when the NRds radius is reduced from 650 to 80 nm. The results are consistent with a 1-D based strain relaxation model. By combining state of the art knowledge of c-axis growth and the strong strain relieving capability of NRds, this process enables multiple and independent single-color emission from a single uniform InGaN/GaN MQWs layer in a single patterning step, then solving color mixing issue in InGaN based nanorods LED devices.

摘要

通过一种原始的具有成本效益的大规模纳米压印光刻工艺,从生长在c面蓝宝石衬底上的InGaN/GaN多量子阱层合成了轴向插入InGaN/GaN多量子阱的氮化镓纳米棒(NRds)。通过设计,这种纳米棒由于c轴多量子阱而表现出单一发射。通过时间分辨发光(TR-PL)和功率依赖PL对纳米棒的发射进行系统研究表明,由于直径控制的应变调谐和量子限域斯塔克效应(QSCE),纳米棒的发光受直径控制,且复合率没有显著下降。当纳米棒半径从650纳米减小到80纳米时,对于In组分含量为19%的3.2纳米厚InGaN/GaN量子阱,观察到从2.28到2.54电子伏特(543纳米到488纳米)高达0.26电子伏特的蓝移。结果与基于一维的应变弛豫模型一致。通过结合c轴生长的现有技术知识和纳米棒强大的应变缓解能力,该工艺能够在单个图案化步骤中从单个均匀的InGaN/GaN多量子阱层实现多种独立的单色发射,从而解决基于InGaN的纳米棒发光二极管器件中的颜色混合问题。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fdf/7990954/8737e2f0618c/41598_2021_86139_Fig1_HTML.jpg

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