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玻璃流动演变及通过直接热压印在纳米孔中制备抗反射纳米突起阵列的机制

Glass Flow Evolution and the Mechanism of Antireflective Nanoprotrusion Arrays in Nanoholes by Direct Thermal Imprinting.

作者信息

Feng Yanfeng, Liu Xiaohua, Li Kangsen, Gong Feng, Shen Jun, Lou Yan

机构信息

Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China.

Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education and Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China.

出版信息

ACS Appl Mater Interfaces. 2021 Apr 14;13(14):16968-16977. doi: 10.1021/acsami.0c22133. Epub 2021 Mar 31.

DOI:10.1021/acsami.0c22133
PMID:33787217
Abstract

Moth-eye-mimicking nanoprotrusion arrays are typical bioinspired broadband antireflection patterns that improve the transmittance and visibility of optical devices by adjusting different geometrical parameters of nanostructures, such as diameter, height, shape, and periodic arrangement, and widely used in solar cells, electronic displays, and so on. Rapid, net-shape, less complicated, and low-cost fabrication of the glass-based moth-eye nanostructure array is a huge challenge. This work adopted the nanohole array template to transform the moth-eye nanostructures on the optical glass by hot embossing combined with ultrasonic-assisted demolding. To investigate the mode transition and filling behavior of the glass nanostructures when compressed into the nanoholes, we conducted a series of hot embossing tests with various processing parameters and characterized the geometrical morphology of the glass-based nanostructure array, such as height and shape. In these tests, surface defects such as nanocracks will occur when inappropriate processing parameters were applied and we evaluated the transmittance performance of defective and fine glass nanostructures and surface with no nanostructures to reveal the effect of nanostructures with different levels of quality on antireflection. This work provides an effective and environmental-friendly method for the fabrication of moth-eye nanostructure arrays with an improved antireflection performance.

摘要

仿蛾眼纳米突起阵列是典型的受生物启发的宽带减反射图案,通过调整纳米结构的不同几何参数(如直径、高度、形状和周期性排列)来提高光学器件的透过率和可视性,广泛应用于太阳能电池、电子显示器等领域。基于玻璃的蛾眼纳米结构阵列的快速、净形、不太复杂且低成本制造是一项巨大挑战。这项工作采用纳米孔阵列模板,通过热压印结合超声辅助脱模来在光学玻璃上制备蛾眼纳米结构。为了研究玻璃纳米结构在压入纳米孔时的模式转变和填充行为,我们进行了一系列具有不同工艺参数的热压印测试,并对基于玻璃的纳米结构阵列的几何形态(如高度和形状)进行了表征。在这些测试中,当采用不合适的工艺参数时会出现诸如纳米裂纹等表面缺陷,我们评估了有缺陷的和良好的玻璃纳米结构以及无纳米结构表面的透过率性能,以揭示不同质量水平的纳米结构对减反射的影响。这项工作为制备具有改进减反射性能的蛾眼纳米结构阵列提供了一种有效且环保的方法。

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