Monteiro Catarina S, Raposo Maria, Ribeiro Paulo A, Silva Susana O, Frazão Orlando
Institute for Systems and Computer Engineering, Technology and Science (INESC TEC) and Department of Physics and Astronomy, Faculty of Sciences, University of Porto, Rua do Campo Alegre 687, 4169-007 Porto, Portugal.
Faculty of Engineering, University of Porto, R. Dr. Roberto Frias, 4200-465 Porto, Portugal.
Sensors (Basel). 2021 Mar 27;21(7):2336. doi: 10.3390/s21072336.
A Fabry-Pérot acoustic sensor based on a graphene oxide membrane was developed with the aim to achieve a faster and simpler fabrication procedure when compared to similar graphene-based acoustic sensors. In addition, the proposed sensor was fabricated using methods that reduce chemical hazards and environmental impacts. The developed sensor, with an optical cavity of around 246 µm, showed a constant reflected signal amplitude of 6.8 ± 0.1 dB for 100 nm wavelength range. The sensor attained a wideband operation range between 20 and 100 kHz, with a maximum signal-to-noise ratio (SNR) of 32.7 dB at 25 kHz. The stability and sensitivity to temperatures up to 90 °C was also studied. Moreover, the proposed sensor offers the possibility to be applied as a wideband microphone or to be applied in more complex systems for structural analysis or imaging.
开发了一种基于氧化石墨烯膜的法布里-珀罗声学传感器，目的是与类似的基于石墨烯的声学传感器相比，实现更快、更简单的制造过程。此外，所提出的传感器采用了减少化学危害和环境影响的方法制造。所开发的传感器具有约246 µm的光学腔，在100 nm波长范围内显示出6.8±0.1 dB的恒定反射信号幅度。该传感器在20至100 kHz之间实现了宽带工作范围，在25 kHz时最大信噪比（SNR）为32.7 dB。还研究了高达90°C温度下的稳定性和灵敏度。此外，所提出的传感器有可能用作宽带麦克风或应用于更复杂的结构分析或成像系统。
